Asml Netherlands B.v.

Ralph Jozef Johannes Gerardus Anna Maria Smeets

Henricus Petrus Maria Pellemans

Gerbrand Van Der Zouw

Vladimir Mikhailovich Krivtsun

Pavel Stanislavovich Antsiferov

Martijn Petrus Christianus Van Heumen

Johannes Matheus Marie De Wit

Marc Van Kemenade

Remco Marcel Van Dijk

Sergii Denega

Disclosed is a laser-driven photon source comprising drive optics which focus drive radiation so as to maintain a plasma. The point spread function of the drive optics has a point spread function () which is configured such that a spectral position of a peak output wavelength of a black body portion of output radiation emitted by said plasma within a desired wavelength band.

Laser-driven photon source and inspection apparatus including such a laser-driven photon source

A laser driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a container containing a gas (e.g., Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. Plasma has an elongate form (L&#x3e;d) and collecting optics is configured to collect photons emerging in the longitudinal direction from the plasma. The brightness of the plasma is increased compared with sources which collect radiation emerging transversely from the plasma. A metrology apparatus using the light source can achieve greater accuracy and/or throughput as a result of the increased brightness. Back reflectors may be provided. Microwave radiation may be used instead of laser radiation to form the plasma.

Photon source, metrology apparatus, lithographic system and device manufacturing method

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Veldhoven, Netherlands

Ralph Jozef Johannes Gerardus Anna Maria Smeets