The Charles Stark Draper Laboratory, Inc.

Ralph Hopkins

Jeffrey T Borenstein

Marc Steven Weinberg

Paul Greiff

Kaplesh Kumar

Christopher E Dubé

Anthony M Moscaritolo

Lyle J Jenkins

Edwin Carlen

Richard M Walker

Edmund R Foster

Carissa Tudryn

Richard H Coco

MEMS and microelectronic devices and fabrication methods feature providing a first material including a glass, providing a second material having an elastic modulus greater than the elastic modulus of silicon, causing the second material to have a surface with a RMS surface roughness of greater than 0.001 &#x3bc;m and less than approximately 0.15 &#x3bc;m, contacting the surface of the second material to a surface of the first material, and applying a voltage between the first and second materials to cause an anodic bond to form.

Anodic bonding of silicon carbide to glass

Electrostatic capacitance measurements are used to detect chemical or biological analytes, or chemical interactions, with great sensitivity. A diaphragm is coated with a material capable of selectively interacting with an analyte of interest, and interaction of the analyte with the coating exerts stresses tangential to the diaphragm's surface. These stresses cause diaphragm displacements that are sensed as varying capacitance.

Stress-based electrostatic monitoring of chemical reactions and binding

A hybrid wafer gyroscope includes a combination of micro-machined components and traditional electromechanical components to form a miniature gyroscope having a high degree of stability. The gyroscope includes a rotor, gimbal, flexures, and stop cutouts micro-machined out of one or more layers of silicon, forming a unitary, planar, and disk-shaped rotor subassembly, which spins about a drive shaft.

Hybrid wafer gyroscope

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Chestnut Hill, MA, United States of America

Ralph Hopkins