The Charles Stark Draper Laboratory, Inc.

Ralph E Hopkins, Iii

Marc Steven Weinberg

Paul A Ward

Anthony S Kourepenis

Eric M Hildebrant

Steven T Cho

Steve T Cho

Christopher V Trainor

Lance C Niles

Trenches which reduce or eliminate force and sensitivity associated with proof mass motion normal to the substrate as a result of voltage transients is disclosed. The trenches provide increased separation between interleaved comb electrodes and the substrate, and thereby also reduce the comb lift to drive ratio. The trenches are typically formed directly below the interleaved comb electrodes, but may also be formed below other suspended portions. Trench depth is from 6-10 microns and provides a comb electrode to substrate separation of approximately 8.5-12.5 microns.

Trenches to reduce charging effects and to control out-of-plane

A micromechanical contact load force sensor is disclosed. The force sensor comprises an array of capacitive load cells on a substrate. The force sensor is able to sense high loads, on the order on 10.sup.9 N/m.sup.2, and distribute the load over a suitable number of the cells of the array while minimizing crosstalk between adjacent cells. The force sensor is useful in biological and robotic applications.

Micromechanical contact load force sensor for sensing magnitude and

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Brookline, MA, United States of America

Ralph E Hopkins, Iii