Ulvac, Inc.

Ralph D Fox

David Albertalli

Robert F Taff

Masao Murata

Yuya Inoue

Koji Hane

Takumi Namekawa

Robert G Boehm, Jr

Perry West

Kei Baba

Robert R McKay

Robert D Taff

The present invention provides applicators reducing generating bubble. Dispersion liquid is supplied while the pressure of a circulation tank on the delivery side is lower than the atmospheric pressure but higher than the pressure of the space in buffer tanks. The dispersion liquid in the discharge chambers is recovered while the pressure in a circulation tank serving as recovery destination is lower than the atmospheric pressure. Gas dissolution can be reduced because the dispersion liquid does not come into contact with gases at pressures higher than the atmospheric pressure and engulffing gas or deformation of solid microparticles can be avoided because no pump is used.

Applicator and method for transferring dispersion liquid

According to the present disclosure, a printer apparatus may include a chuck configured to support a substrate thereon, a rail spaced apart from the chuck, a printhead carriage frame coupled to the rail and containing a printhead carriage housing at least one printhead therein, a first camera assembly configured to capture image data of the printhead and provide the image data to a computer, and a computer receiving the image data from the first camera assembly and configured to determine a deviation between a desired position of the printhead and an actual position of the printhead.

Camera-based automatic nozzle and substrate alignment system

Growing community of inventors

Pleasanton, CA, United States of America

Ralph D Fox