Synaptics Corporation

Kla-tencor Technologies Corporation

Tencor Instruments

Other

Kla Tencor Corporation

Transient Dynamics

Ralph C Wolf

Timothy P Allen

David W Gillespie

Shawn P Day

Armand P Neukermans

Jamie Michael Sullivan

Stanley E Stokowski

John D Greene

Eric Vella

Khiem D Vo

Eva L Benitez

Carver A Mead

Christopher F Bevis

Grace H Chen

Brian C Leslie

John L Vaught

Kai Cao

Peter C Jann

Lee K Galbraith

Evan R Mapoles

Derek Mackay

David Wolze

Paul Donders

Dongsheng Don Chen

Matthew B Lutzker

Dongsheng (Don) Chen

David c/o Synaptics Inc Gillespie

Disclosed are apparatus and methods for inspecting or measuring a specimen. An incident beam is directed across a plurality of consecutive scan portions of a specimen so that an output beam profile from each scan portion is consecutively collected by a photomultiplier tube (PMT), and the scan portions include at least one or more first scan portions and a next scan portion that is scanned after the one or more first scan portions. After or while the incident beam is directed to the one or more first scan portions of the specimen, an output signal for each first scan portion is obtained based on the output beam profile that is collected by the PMT for each first scan portion. An expected output beam profile for the next scan portion is determined based on the output signal that is obtained for each one or more first scan portions. As the incident beam is directed towards the next scan portion, a gain input to the PMT for the next scan portion is set based on the expected output beam profile so that the gain for such next scan portion results in a measured signal at the PMT that is within a predefined specification of the PMT or other hardware components that receive a measured signal from the PMT.

Enhanced high-speed logarithmic photo-detector for spot scanning system

A method of generating a signal comprising providing a capacitive touch sensor pad including a matrix of X and Y conductors, developing capacitance profiles in one of an X direction and a Y direction from the matrix of X and Y conductors, determining an occurrence of a single gesture through an examination of the capacitance profiles, the single gesture including an application of at least two objects on the capacitive touch sensor pad, and generating a signal indicating the occurrence of the single gesture.

Object position detector with edge motion feature and gesture recognition

A method of generating cursor motion signals for improved usability is provided. In one embodiment, the method comprises detecting object motion in a sensing region and providing cursor motion signals in accordance with cursor motion values generated responsive to continuation of the object motion in the inner region. This embodiment further comprises providing cursor motion signals configured to generate cursor motion that combines incremental cursor motion with additional cursor motion responsive to the object moving from the inner region into the outer region, where the incremental cursor motion comprises motion toward an edge of the display correlating to an edge of the sensing region proximate the object, and where the additional cursor motion comprises cursor motion indicated by cursor motion values generated responsive to continuation of the object motion in the outer region of the sensing region.

A method of indicating a gesture proximate a touch-sensor pad is provided. In one embodiment, the method comprises detecting a first presence of a conductive object proximate to the touch-sensor pad, and initiating a gesture signal if the first presence lasts a first duration of time that is less than a first reference amount of time. In this embodiment, the method further comprises detecting a second presence occurring a first elapsed time after an end of the first presence, and terminating the gesture signal if the first elapsed time is greater than a second reference amount of time, otherwise maintaining the gesture signal at least until an end of the first elapsed time and at least until an occurrence of a terminating event. This and other embodiments can be used to initiate virtual-button signals in response to specific gestures by the user.

An integrated inspection system adapted to inspect a substrate. A first inspection station performs a first inspection of the substrate at a first resolution, and identifies defect candidate sites. A controller determines position information associated with each of the identified defect candidate sites. A second inspection station performs a second inspection of the defect candidate sites at a second resolution, where the second resolution is higher than the first resolution. A substrate stage moves the substrate between the first inspection station and the second inspection station, and indexes the substrate under both the first inspection station and the second inspection station.

Inspection tool

Disclosed are methods and apparatus for detecting a relatively wide dynamic range of intensity values from a beam (e.g., scattered light, reflected light, or secondary electrons) originating from a sample, such as a semiconductor wafer. In other words, the inspection system provides detected output signals having wide dynamic ranges. The detected output signals may then be analyzed to determine whether defects are present on the sample. For example, the intensity values from a target die are compared to the intensity values from a corresponding portion of a reference die, where a significant intensity difference may be defined as a defect. In a specific embodiment, an inspection system for detecting defects on a sample is disclosed. The system includes a beam generator for directing an incident beam towards a sample surface and a detector positioned to detect a detected beam originating from the sample surface in response to the incident beam. The detector has a sensor for detecting the detected beam and generating a detected signal based on the detected beam and a non-linear component coupled to the sensor. The non-linear component is arranged to generate a non-linear detected signal based on the detected signal. The detector further includes a first analog-to-digital converter (ADC) coupled to the non-linear component. The first ADC is arranged to digitize the non-linear detected signal into a digitized detected signal.

Apparatus and methods for optically inspecting a sample for anomalies

The disclosed device is directed towards a method for recognizing a gesture made on a touch-sensor pad in a touch-sensing system providing X and Y position information to a host comprising detecting a first presence of a conductive object on the touch-sensor pad. The method includes comparing the duration of the first presence with a first reference amount of time, and initiating a first gesture signal to the host if the duration of the first presence is less than the first reference amount of time. The method also includes detecting a second presence of the conductive object on the touch-sensor pad and comparing the duration between the first presence and the second presence with a second reference amount of time. The method includes comparing the duration of the second presence with a third reference amount of time as well as terminating the first gesture signal if the duration between the first presence and the second presence is greater than the second reference amount of time; and maintaining the first gesture signal and repeatedly sending X and Y position information to the host until the occurrence of a terminating event if the amount of time between the first presence and the second presence is less than the second reference amount of time and if the duration of the second presence is greater than the third reference amount of time.

Methods for recognizing gestures made by a conductive object on a touch-sensor pad and for cursor motion are disclosed. Tapping, drags, pushes, extended drags and variable drags gestures are recognized by analyzing the position, pressure, and movement of the conductive object on the sensor pad during the time of a suspected gesture, and signals are sent to a host indicating the occurrence of these gestures. Signals indicating the position of a conductive object and distinguishing between the peripheral portion and an inner portion of the touch-sensor pad are also sent to the host.

Methods for recognizing gestures made by a conductive object on a touch-sensor pad are disclosed. Tapping, pushing, hopping, and zigzag gestures are recognized by analyzing the position, pressure, and movement of the conductive object on the sensor pad during the time of a suspected gesture, and signals are sent to a host indicating the occurrence of these gestures. Signals for compensating for unintended motion of the conductive object on the touch-sensor pad during the gestures are also sent to the host.

According to the present invention, a photomultiplier tube is used with a high-speed feedback mechanism to continuously modulate the gain of the tube in response to the size of the input signal. The gain of the tube and the anode current are independently converted to ideal logarithms. These signals are then subtracted from one another to reconstruct a true logarithmic representation of the optical signal. This log-light-level signal has a higher dynamic range and faster temporal response than has previously been achieved by other methods.

Growing community of inventors

Santa Clara, CA, United States of America

Ralph C Wolf