Endress + Hauser Gmbh + Co. Kg

Ralf Nürnberger

Wolfgang Dannhauer

Dietfried Burczyk

Anh Tuan Tham

Raimund Becher

Olaf Textor

Fred Haker

Olaf Krusemark

A pressure sensor, comprising: a semiconductor pressure measuring transducer having a measuring membrane and a circuit for transducing a deformation of the measuring membrane into a signal; a pressure transfer structure having a hydraulic path, which extends through a solid body between a first a second opening. The first opening is sealed by an isolating diaphragm, which is contactable with a pressure, in order to introduce the pressure to be measured into the hydraulic path. The hydraulic path opens, at the second opening, into a transducer chamber, in which the pressure measuring transducer is arranged and which is sealed by the measuring membrane of the pressure measuring transducer. The hydraulic path contains a transfer liquid; a filling element, which is arranged in the transducer chamber, in order to fill hollow spaces between metal walls of the transducer chamber and the semiconductor pressure measuring transducer. An insulator plate, which is arranged in the transducer chamber between the measuring membrane and a wall of the transducer chamber lying opposite the measuring membrane; wherein the insulator plate is affixed to the filling element or is embodied as one piece with the filling element.

Pressure sensor with semiconductor pressure measuring transducer

A hydraulic pressure intermediary includes: a platform, which has a bowl-shaped surface having an annular, platform-surface edge region, a platform-surface central region depressed relative to the platform-surface edge region and surrounded by the platform-surface edge region, and an annular platform-surface transition region, which borders, on its inner side, the platform-surface central region and, on its outer side, the platform-surface edge region; a bowl-shaped, separating membrane having a flat, annular, separating-membrane edge region, a separating-membrane central region depressed relative to the separating-membrane edge region and an annular separating-membrane transition region, which borders, on its inner side, the separating-membrane central region and, on its outer side, the separating-membrane edge region. The separating membrane is connected with the platform-surface edge region within the separating-membrane edge region along a surrounding joint. Further, the separating-membrane transition region includes an annular moat having a moat outer side, a moat inner side, and a moat transition zone, wherein the moat outer side has a first annular inclined surface, which borders on the separating-membrane edge region, the moat inner side includes a second annular inclined surface, which borders on the separating-membrane central region, and the moat transition zone extends between the first and the second inclined surfaces.

Hydraulic pressure intermediary

A pressure difference transducer includes a hydraulic body, in which is formed an overload chamber containing an overload membrane. The overload chamber divides the overload chamber into a high-pressure chamber portion and a low-pressure chamber portion. The high-pressure chamber portion communicates with a first hydraulic path, which extends between a first diaphragm seal and a high-pressure side of a pressure measuring cell, and the low-pressure chamber portion communicates with a second hydraulic path, which extends between a second diaphragm seal and a low-pressure side of the pressure measuring cell. The low-pressure chamber portion has an essentially convex membrane bed, against which the overload membrane lies in a rest position.

Pressure differential sensor comprising an excess-load membrane

A pressure transmitter for registering the pressure of a medium. The pressure transmitter includes a transmitter body, a dividing membrane attached to the transmitter body forming thereby a pressure chamber, a first pressure canal and a second pressure canal. The two pressure canals exhibit different hydraulic properties.

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Potsdam, Germany

Ralf Nürnberger