Vistec Semiconductor Systems Gmbh

Kla-tencor Mie Gmbh

Ralf Friedrich

Daniel Skiera

Dirk Soenksen

Detlef Schupp

Thin Van Luu

Andreas Draeger

Wolfgang Langer

A method for optical inspection, detection and visualization of defects () on wafers () is disclosed, wherein at least one camera () acquires images of at least one portion () of the wafer () relative to a reference point () of the wafer (), and the Cartesian coordinates of the image data associated with the at least one portion () of the wafer () are transformed into polar coordinates.

Method for optical inspection, detection and visualization of defects on disk-shaped objects

The invention relates to a method of learning a knowledge-based database used in automatic defect classification. According to this method, the user is spared a series of entries as the system carries out an automatic learn mode, which requires a reduced number of user entries.

Method of learning a knowledge-based database used in automatic defect classification

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Giessen, Germany

Ralf Friedrich