Robert Boschgmbh

Carl Zeiss Smt Gmbh

Ralf Ameling

Burkhard Kuhlmann

Mirko Hattass

Rolf Scheben

Thorsten Balslink

Robert Maul

Benjamin Schmidt

Markus Hauf

Stefan Leidich

Remigius Has

Oliver Krayl

Jens Strobel

Dirk Eichel

Bassem Baffoun

Hermann Aichele

A sensor device for capturing the displacement position of an optical component includes a plurality of stator electrodes and a mechanism or restricting the electric field that is relevant to the measurement of the displacement position to the region of the stator electrodes.

Sensor device

In one embodiment, a sensor arrangement for the contactless sensing of angles of rotation on a rotating part includes a disk-shaped target, a coil arrangement, and an evaluation and control unit. The disc-shaped target is coupled to the rotating part and includes at least two metal surfaces that influence the inductances in the flat detection coils due to eddy current effects as a function of the degree of overlap. The disc-shaped target can generate at least one piece of information for ascertaining the instantaneous angle of rotation of the rotating part, in connection with the coil arrangement. The coil arrangement has three flat detection coils uniformly distributed on the circumference of a circle. The evaluation and control unit can generate essentially sinusoidal evaluation signals which represent the changes in inductance of the detection coils and can evaluate them for calculating the angle of rotation.

Sensor arrangement for the contactless sensing of angles of rotation on a rotating part

A rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor include: a first rotational element, a second rotational element and a drive structure moveable in parallel to the drive plane, the first rotational element being drivable about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element being drivable about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure being (i) coupled to the first and second rotational elements, and (ii) configured to generate a drive mode in phase opposition of the first and second rotational vibrations.

Rotation rate sensor and a method for operating a rotation rate sensor

A rotation-rate sensor having a substrate with main extension plane, for detecting a rotation rate, extending in a direction parallel/orthogonal to the main plane; the sensor including a primary/secondary pair of seismic masses; the primary pair having first/second primary masses; the secondary pair having first/second secondary masses; the first/second primary masses being movable relative to the substrate along a primary deflection direction extending parallel to the main plane; the first/second secondary masses being movable relative to the substrate along a secondary deflection direction extending parallel to the main plane; the first/second primary masses and the first/second primary masses being movable antiparallel or parallel to one another corresponding to the deflection direction, essentially extending orthogonally to the secondary deflection direction; and the primary pair and/or secondary pair being drivable so that, based on sensor rotation, the Coriolis force leads to deflection of the first/second primary masses and/or the first/second secondary masses.

Rotation-rate sensor having a substrate having a main extension plane for detecting a rotation rate

Growing community of inventors

Aalen, Germany

Ralf Ameling