Leybold Vakuum Gmbh

Oerlikon Leybold Vacuum Gmbh

Leybold Vacuum Gmbh

Ralf Adamietz

Christian Beyer

Heinrich Engl&auml;nder

G&uuml;nter Sch&uuml;tz

Dieter Haas

Roland Blumenthal

Gunter Schutz

Markus Henry

Hans-Rudolf Fischer

Gerhard Wilhelm Walter

Dieter G&ouml;tz

Dirk Kalisch

Günter Schütz

A device (), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump () and an atmospheric-pressure-side vacuum pump (). The suction-side vacuum pump () is a mechanical kinetic vacuum pump with a rotor () and a stator (). The stator () has a rotationally-symmetrical inner surface which matches the outer rotor geometry. The rotor () in the mechanical kinetic vacuum pump () is provided with a structure () carrying out the gas pumping. Said gas pumping structure comprises webs (), the angle and width of which decrease from the suction side to the pressure side. The gas throughflow is improved. The outer diameter of the rotor () and the inner diameter of the stator () of the suctnion-side pump decrease from the suction side to the pressure side.

Evacuating device

A vacuum pump ( ) includes a housing ( ) in which a suction inlet opening ( ) is defined. A vibration absorber ( ) includes a suspension body ( ) and an absorber jacket ( ). The housing ( ) of the vacuum pump ( ) is connected directly to one end of the suspension body ( ) in vacuum-tight connection and an opposite end of the suspension body carries a connecting port ( ). By connecting the suspension body directly with the housing without mechanically releasable interconnection elements, the overall height of the pump and suspension body assembly is reduced.

Vacuum pump with vibration absorber

A friction pump ( ), such as turbomolecular pump, includes a steel housing ( ) in which a steel shaft ( ) is supported by a bearing ( ). A rotor ( ) with a central bore ( ) is mounted on the shaft. In order to reduce the risk of the joint area between the rotor and the shaft becoming loose, a ring groove ( ) which encompasses the joint area between the rotor is provided in an area adjacent at least one of the faces of the rotor. A reinforcing ring ( ) of a high strength, low thermal expansion material encompasses one of a thrust member ( ) and cylindrical rotor sections ( ) adjacent the shaft.

Rotor fixture for a friction vacuum pump

A friction vacuum pump ( ) with a frame ( ), stator ( ), rotor ( ) and housing; all functional elements of the pump are combined into one unit ( ), which, in turn, can be inserted into a housing ( ) that has been adapted to a specific application; using this procedure, all separate connection housing can be eliminated and optimal conductance can be achieved (FIG. 1).

Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump

The invention relates to a friction vacuum pump ( ) with a stator ( ) and a rotor ( ), which form at least two pump stages ( ) with one gas inlet ( ) each, as well as with junction for the pump stages, which are equipped with junction openings ( ) and serve for the connection of the gas inlets ( ) of the pump stages with devices to be evacuated; in order to avoid high conductance losses it is proposed that the junction openings ( ) are located in a plane which is disposed laterally adjacent to the pump stages ( ) such that the distance between the junction openings ( ) and the rotor axis ( ) is of minimum feasible size.

Friction vacuum pump with a stator and a rotor

Growing community of inventors

Wermelskirchen, Germany

Ralf Adamietz