Kla Corporation

Rajkumar Theagarajan

Yang Li

Brian Duffy

Kris Bhaskar

Jing Zhang

Yujie Dong

Graham Jensen

Atiqur Rahman Chowdhury

Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem that include a setup deep learning (DL) model configured for separately performing defect detection for a specimen based on output generated for the specimen by each of two or more modes of an inspection system, respectively, and separately re-performing defect detection for the specimen based on masked output generated for each of the modes, respectively. The computer subsystem determines a difference between results of separately performing and separately re-performing the defect detections for each of the modes, respectively, and identifies a subset of the modes for which the difference is larger than other modes as candidate mode(s) for inspection of the specimen.

Deep learning based mode selection for inspection

Growing community of inventors

Milpitas, CA, United States of America

Rajkumar Theagarajan