Applied Materials, Inc.

Raja Murali Dhamodharan

Shu-Kwan Danny Lau

Martin Jeffrey Salinas

Danny D Wang

Abraham Palaty

Vinodh Ramachandran

Shainish Nellikka

Aniketnitin Patil

A heating module for a substrate processing chamber includes heating lamps coupled to a reflector plate and a heat exchanger. The heat exchanger cools a gas within the heating module. A fan within the heating module circulates the gas through apertures in the reflector plate to cool the heating bulbs. The gas is cooled by the heat exchanger, and is recirculated. One or more shrouds directs the gas as the gas is being circulated.

Air shrouds with integrated heat exchanger

The present disclosure relates to lift assemblies, and related methods and components, for substrate processing chambers. In one implementation, a lift assembly for disposition in relation to a substrate processing chamber includes a first motor, a first drive assembly coupled to the first motor, and a first support block coupled to the first drive assembly. The first motor is configured to linearly move the first support block using the first drive assembly. The lift assembly includes a second motor, a second drive assembly coupled to the second motor, and a second support block coupled to the second drive assembly. The second motor is configured to linearly move the second support block using the second drive assembly, and the second motor is configured to linearly move the second support block independently of the first motor linearly moving the first support block.

Lift assemblies, and related methods and components, for substrate processing chambers

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Madurai, India

Raja Murali Dhamodharan