Asm IP Holding B.v.

Raj Singu

Eric James Shero

Carl Louis White

Todd Robert Dunn

Herbert Terhorst

Bhushan Zope

Christopher Wuester

A workpiece susceptor body can include a front face configured to support a workpiece, a back face opposite the front face, a workpiece contact zone at least partially forming a support boundary on an inner portion of the front face, and a plurality of axial channels disposed within the susceptor body. The workpiece contact zone can be disposed radially inward of an outer edge of a workpiece positioned on the front face in a processing configuration. Each of the plurality of axial channels may connect to corresponding openings extending into an outer portion of the front face. Each of the openings may be disposed radially outward of the workpiece contact zone of the susceptor body.

Substrate susceptor using edge purging

Heater electrical connector and adapter

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Phoenix, AZ, United States of America

Raj Singu