Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Rainer Zeibe

Volker Kirchhoff

Matthias Fahland

Gösta Mattausch

John Fahlteich

Goesta Mattausch

Henrik Flaske

Peter Feinaeugle

Dieter Weiske

Sebastian Bunk

Ralf BLÜTHNER

Peter FEINÄUGLE

Device for producing an electron beam includes a housing, which delimits a space that is evacuatable and has an electron beam outlet opening; an inlet structured and arranged for feeding process gas into the space; and a planar cathode and an anode, which are arranged in the space, and between which, a glow discharge plasma is producible by an applied electrical voltage. Ions are accelerateable from the glow discharge plasma onto a surface of the cathode and electrons emitted by the cathode are accelerateable into the glow discharge plasma. The cathode includes a first part made of a first material at least on an emission side, which forms a centrally arranged first surface region of the cathode, and a second part made of a second material, which forms a second surface region of the cathode that encloses the first surface region.

Device for producing an electron beam

Growing community of inventors

Radeburg, Germany

Rainer Zeibe