Infineon Technologies Ag

Infineon Technologies Austria Ag

Rainer Pelzer

Michael Nelhiebel

Bernhard Weidgans

Ravi Keshav Joshi

Sven Schmidbauer

Marianne Mataln

Markus Zundel

Manfred Schneegans

Werner Robl

Martin Mischitz

Johann Gatterbauer

Klaus Goller

Sven Lanzerstorfer

Jakob Kriz

Olaf Heitzsch

Barbara Eichinger

Michael Sternad

Joerg Busch

Norbert Mais

Fortunato Lopez

Stefan Karner

Heiko Assmann

Axel Buerke

Alfred Binder

Katrin Albers

Marianne Kolitsch

Antonia Maglangit

Siti Amira Faisha Shikh Zakaria

Axel Bürke

Johannes Zechner

Ali Roshanghias

A multi-chip device is provided. The multi-chip device includes a first chip, a second chip mounted on the first chip, and a hardened printed or sprayed electrically conductive material forming a sintered electrically conductive interface between the first chip and the second chip.

Multi-chip device, method of manufacturing a multi-chip device, and method of forming a metal interconnect

A semiconductor device includes: a semiconductor substrate; a power device formed in the semiconductor substrate; a metal bilayer formed over the semiconductor substrate, the metal bilayer including a discontinuous metal layer formed on and in contact with a continuous base metal layer; and one or more contact pads formed in the metal bilayer or in a metallization layer above the metal bilayer. The discontinuous metal layer includes a plurality of metal blocks which are laterally spaced apart from one another and which form a heat sink structure over the power device. The continuous base metal layer is configured to laterally spread heat energy from the power device to the plurality of metal blocks. Methods of producing the semiconductor device are also described.

Semiconductor device power metallization layer with stress-relieving heat sink structure

A power semiconductor device includes a semiconductor body configured to conduct a load current. A load terminal electrically connected with the semiconductor body is configured to couple the load current into and/or out of the semiconductor body. The load terminal includes a metallization having a frontside and a backside. The backside interfaces with a surface of the semiconductor body. The frontside is configured to interface with a wire structure having at least one wire configured to conduct at least a part of the load current. The frontside has a lateral structure formed at least by at least one local elevation of the metallization. The local elevation has a height in an extension direction defined by a distance between the base and top of the local elevation and, in a first lateral direction perpendicular to the extension direction, a base width at the base and a top width at the top.

Terminal structure of a power semiconductor device

A semiconductor device includes a structured interlayer on a substrate, a structured power metallization on the structured interlayer, and a barrier on the structured power metallization. The barrier is configured to prevent diffusion of at least one of water, water ions, sodium ions, potassium ions, chloride ions, fluoride ions, and sulphur ions towards the structured power metallization. A first defined edge of the structured interlayer faces the same direction as a first defined edge of the structured power metallization and extends beyond the first defined edge of the structured power metallization by at least 0.5 microns. The structured interlayer has a compressive residual stress at room temperature and the structured power metallization generates a tensile stress at room temperature that is at least partly counteracted by the compressive residual stress of the structured interlayer. The first defined edge of the structured power metallization has a sidewall which slopes inward.

Barrier for power metallization in semiconductor devices

A semiconductor device includes a semiconductor substrate, a power transistor formed in the semiconductor substrate, the power transistor including an active area in which one or more power transistor cells are formed, a first metal pad formed above the semiconductor substrate and covering substantially all of the active area of the power transistor, the first metal pad being electrically connected to a source or emitter region in the active area of the power transistor, the first metal pad including an interior region laterally surrounded by a peripheral region, the peripheral region being thicker than the interior region, and a first interconnect plate or a semiconductor die attached to the interior region of the first metal pad by a die attach material. Corresponding methods of manufacture are also described.

Semiconductor device having a die pad with a dam-like configuration

A semiconductor device includes a semiconductor substrate, a power metallization structure formed above the semiconductor substrate and a barrier layer formed between the power metallization structure and the semiconductor substrate. The barrier layer is configured to prevent diffusion of metal atoms from the power metallization structure in a direction toward the semiconductor substrate. The power metallization structure is in direct contact with the barrier layer or an electrically conductive layer formed on the barrier layer in a first region. The semiconductor device further includes a passivation layer interposed between the barrier layer and the power metallization structure in a second region. Corresponding methods of manufacturing the semiconductor device are also described.

Method of manufacturing a semiconductor device having a power metallization structure

Power metallization structure for semiconductor devices

A semiconductor device includes a substrate, a structured interlayer on the substrate and having a defined edge, and a structured metallization on the structured interlayer and also having a defined edge. The defined edge of the structured interlayer faces the same direction as the defined edge of the structured metallization. The defined edge of the structured interlayer extends beyond the defined edge of the structured metallization by at least 0.5 microns so that the defined edge of the structured metallization terminates before reaching the defined edge of the structured interlayer. The structured interlayer has a compressive residual stress at room temperature and the structured metallization generates a tensile stress at room temperature that is at least partly counteracted by the compressive residual stress of the structured interlayer.

Semiconductor device with compressive interlayer

A semiconductor device includes a substrate, a structured interlayer on the substrate and having defined edges, and a structured metallization on the structured interlayer and also having defined edges. Each defined edge of the structured interlayer neighbors one of the defined edges of the structured metallization and runs in the same direction as the neighboring defined edge of the structured metallization. Each defined edge of the structured interlayer extends beyond the neighboring defined edge of the structured metallization by at least 0.5 microns so that each defined edge of the structured metallization terminates before reaching the neighboring defined edge of the structured interlayer. The structured interlayer has a compressive residual stress at room temperature.

Compressive interlayer having a defined crack-stop edge extension

A device includes a tube extending in a longitudinal direction and a hollow channel arranged in the tube. An end part of the tube is formed such that first electromagnetic radiation paths extending in the tube and outside of the hollow channel in the longitudinal direction are focused in a first focus.

Devices for providing an electrical connection

Growing community of inventors

Wernberg, Austria

Rainer Pelzer