Leybold-heraeus Gmbh

Rainer Nitsche

Eberhard Unsold

Reiner Wechsung

Raimund Kaufmann

Franz Hillenkamp

Lothar Aberle

Walter Bank

An apparatus for analyzing a sample by electromagnetic irradiation includes a vacuum chamber, a support for holding the sample in the vacuum chamber, an arrangement for irradiating the sample with an electromagnetic beam, a mass analyzer disposed in the vacuum chamber, an arrangement for extracting particles from the sample and introducing them into the mass analyzer and a layer of conductive material situated in the vicinity of support in the zone of the sample.

Apparatus for analyzing samples by electromagnetic irradiation

A sample analyzer includes a microscope for alternatively focusing an electromagnetic radiation on the sample to cause ion emission therefrom and visually observing the sample; a mass spectrometer for the mass analysis of the emitted ions; an illuminating device for lighting the sample for the microscopic visual observation thereof; an ion optical system for directing the emitted ions into the mass spectrometer; and a displaceably supported carrier carrying the ion optical system and at least one part of the illuminating device. The carrier has a first position in which the ion optical system is in an operating position in alignment with the sample and a second position in which the illuminating device is in an operating position in alignment with the sample. There is further provided an actuator for selectively moving the carrier into its positions in a direction generally perpendicular to the axis of the ion optical system.

Sample analyzer

Growing community of inventors

Frankfurt-am-Main, Germany

Rainer Nitsche