Leybold Gmbh

Oerlikon Leybold Vacuum Gmbh

Leybold Vakuum Gmbh

Otto Fuchs Kg

Rainer Hölzer

Christian Beyer

Michael Froitzheim

Hermann Boy

Gregor Terlinde

Gernot Fischer

Christian Harig

Alois Greven

Markus Liessmann

Gunter Holstein

Dieter Sauer

Lars Etschenberg

Kai Uhlig

Robert Stolle

Ioannis Anastassiadis

Ishan Roth

A vacuum pump comprises stator elements in a pump housing. The stator elements cooperate with rotor elements. The rotor elements are held by a rotor shaft, wherein the rotor shaft is mounted in the pump housing via bearing elements. The bearing element is surrounded by a supporting element, wherein the supporting element comprises an inner portion, an outer portion and a plurality of spring arms connecting the inner portion () to the outer portion. Each spring arm comprises at least one hollow space.

Vacuum pump

A vacuum-pump rotor, in particular a vacuum-pump rotor for a turbomolecular pump, having a hub element for connecting to a rotor shaft or for forming a rotor shaft. A plurality of rotor blades are connected to the hub element. In order to form a vacuum-pump rotor by means of which a high tip speed can be achieved, the hub element and/or the rotor blades are produced of a plurality of material layers.

Vacuum-pump rotor

A vacuum pump comprises a rotor shaft, which bears one or more rotor elements. The rotor shaft is driven by an electrical driver. A stator is arranged between the rotor elements. The rotor shaft is supported by bearings. The highly heat-generating components such as the driver and the stator are connected to a second housing part in particular by means of a support member. Heat-sensitive components such as the bearing are supported by means of a separate first housing part. The two housing parts can be kept at different temperatures, for example by means of separate cooling devices. Thus, the operating temperature of the in particular pressure-side bearing can be reduced, and therefore the service life can be extended.

A vacuum pump () includes a pump unit () and an operating unit () arranged spaced from the pump unit (). The operating unit () is connected with the pump unit () for controlling it. The pump unit () and the operating unit () respectively comprise a transceiver module () for transmitting and receiving control and operational data bidirectionally in a wireless manner. The pump unit () and the operating unit () are exclusively connected with each other in a wireless manner. By the omission of electrical lines, the induction of interfering signals is excluded. Wall perforations for lead-through of electrical lines are omitted.

A test-gas leak detector () includes a connection () for a device under test, a sniffer, or a leak detector chamber, a high-vacuum pump (), a test-gas detector () that is connected on the intake side of said pumps, and a test-gas conduit () leading from the connection of the leak detector (). The conduit is connected to at least one intermediate stage of the high-vacuum pump () in addition to the pre-vacuum zone of the high-vacuum pump () via conduit sections () and valves (). A housing (), in which at least some of the conduits and valves and the high-vacuum pump () are integrated, forms part of the leak detector () and a detachable slide-in module () forms part of the high-vacuum pump. The slide-in module has an external jacket construction () comprising passages () and when the leak detector () is operational, is situated in a receiving opening () that is provided in the housing ().

Test-gas leak detector

A vacuum pump () has an inlet () and an outlet (). Plug-in screw fittings () are connected with the inlet and the outlet. The plug-in screw fittings include a bore with an internal bevel () that receives a flexible connecting line (), a chuck collet (), and an O-ring () frictionally in a vacuum-tight relationship. In this manner, a more simple and versatile connection is provided between the vacuum pump and the connecting lines.

Vacuum pump comprising an outlet

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Hürth, Germany

Rainer Hölzer