Wacker Chemie Ag

Rainer Hauswirth

Harald Hertlein

Dieter Weidhaus

Robert Enggruber

Reiner Pech

Gerhard Forstpointner

Dirk Weckesser

Peter Gruebl

Andreas Schneider

Michael Fricke

Martin Brixel

A method for mechanically classifying polycrystalline silicon chunks or granules with a vibratory screening machine, involves setting silicon chunks or granules present on one or more screens each comprising a screen lining in vibration such that the silicon chunks or silicon granules perform a movement which causes the silicon chunks or silicon granules to be separated into various size classes, wherein a screening index is greater than or equal to 0.6 and less than or equal to 9.0.

Classifying polysilicon

Silicon seed particles which can be used for producing polycrystalline silicon granules in a fluidized-bed reactor are prepared by a process wherein a milling gas stream is introduced into a chamber containing polycrystalline silicon granules, as a result of which individual particles of the polycrystalline silicon granules are accelerated in such a manner that they collide with other particles of the polycrystalline silicon granules, and in this manner the polycrystalline silicon granules are comminuted, wherein the milling gas stream is introduced into the chamber by at least one jet nozzle made of hard metal.

Silicon seed particles for the production of polycrystalline silicon granules in a fluidized bed reactor

Granular polysilicon is fed into a screening plant, divided into two or more fractions by means of one or more screen surfaces, and thereby classified and dedusted wherein a throwing motion of the granular polysilicon in the screening plant removes adhering dust particles from the granular polysilicon, the removed dust particles are taken off from the screening plant by means of a gas flow supplied to the screening plant, and the screening plant is of gas-tight design and supply and takeoff of the gas flow are effected such that the screening plant is at a positive pressure compared to the surroundings.

Apparatus and method for classifying and dedusting granular polysilicon

Segregation of silicon granules in the fluidized bed production of polycrystalline silicon is achieved by successively transferring granular polycrystalline silicon through a plurality of vessels designed for funnel flow of granular material. The transfers may occur prior to introduction of feed particles into the reactor, or the enlarged granules from the reactor may be thus transferred to improve product size uniformity.

Method for producing granular polysilicon

Granular polycrystalline silicon includes a compact matrix including radiating acicular crystal aggregates of crystal size from 0.001-200 &#x3bc;m. A process for producing granular polycrystalline silicon includes producing granular silicon in a fluidized bed reactor from a gas mixture containing TCS (20-29 mol %) and hydrogen at a fluidized bed temperature of 900-970&#xb0; C., dividing the granular silicon in a screen system having at least one screen deck into at least two screen fractions, the smallest screen fraction being ground in a grinding system to give seed particles having a size of 100-1500 &#x3bc;m and a mass-based median value from 400 to 900 &#x3bc;m, and these seed particles being supplied to fluidized bed reactor, and a further screen fraction being supplied to a fluidized bed reactor, and being surface-treated with a gas mixture containing TCS (5.1-10 mol %) and hydrogen at a fluidized bed temperature of 870-990&#xb0; C.

Granular polycrystalline silicon and production thereof

Granular polycrystalline silicon is disclosed, which has a convexity of 0.850-1.000 and a chlorine content of 10-40 ppmw. Also disclosed is a process for producing granular polycrystalline silicon in a fluidized bed reactor, which includes: (a) fluidization of silicon seed particles by gas flow in a fluidized bed heated by a heating apparatus, (b) addition of a silicon- and halogen-containing reaction gas resulting in pyrolytic deposition of elemental silicon on heated seed particle surfaces, (c) forming the granular polycrystalline silicon, (d) removing from the reactor particles and offgas containing hydrogen halide, and (e) metered addition of fresh seed particles. The hydrogen halide concentration in the offgas is determined as the controlled variable. The rate of metered addition of fresh seed particles and heating output of the heating apparatus are controlled as manipulated variables to keep the hydrogen halide concentration in the offgas within an above-defined range during operation.

High-purity polysilicon granules are prepared by depositing reaction gas on silicon granules in a fluidized bed reactor having:

Process for the continuous production of polycrystalline high-purity silicon granules

A fluidized bed process for the production of polycrystalline silicon granules supplies, in addition to reaction gas, a gas containing 99.5 to 95 mol. percent hydrogen and 0.5 to 5 mol. percent gaseous silicon compounds, and the reactor wall is maintained at the same or a higher temperature than the reaction zone, such that the deposition of silicon on reactor internals is minimized.

Growing community of inventors

Kirchdorf, Germany

Rainer Hauswirth