Siemens Aktiengesellschaft

Epcos Ag

Rainer Braun

Oswald Spindler

Andreas Link

Gudrun Henn

Helmuth Treichel

Thomas Kruck

Bernhard Neureither

A microacoustic component includes an active layer and an electrode. The electrode includes a first metal layer facing the active layer, a second metal layer facing away from the active layer, and a third layer arranged between the first metal layer and the second metal layer. The third layer serves as a diffusion barrier.

Method for forming an electrode

The method of the present invention provides in a simple manner, the deposition of boron nitride layers with microcrystalline cubic structure which are suitable as insulating layers in VLSI-circuits, as mask membranes in x-ray lithography, as well as coating hard substances. Due to the use of excited starting substances that already contain boron and nitrogen in one molecule and are preferably liquid or solid, and the use of a plasma-CVD-method, the method can be performed using in temperatures of below 500.degree. C. The excitation of the starting substance proceeds preferably in inductive or capacitative fashion in a hollow cathode.

Method for manufacturing microcrystalline cubic boron-nitride-layers

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Munich, Germany

Rainer Braun