Average Co-Inventor Count = 2.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Steag Rtp Systems Gmbh (1 from 31 patents)
2. Ag Associates, Inc. (1 from 8 patents)
2 patents:
1. 5980637 - System for depositing a material on a substrate using light energy
2. 5820942 - Process for depositing a material on a substrate using light energy