Robert Boschgmbh

Rahmi Gencoglu

Ulrich Kallmann

Jochen Strähle

Uwe Kasten

An interferometric system having an illumination arm, including a light source and an illuminating optical system, for forming an illuminating beam; an object arm, including a reference element for measuring an object having an object surface to be measured, for forming an image-rays path, the object to be measured having an object surface inaccessible to direct illumination; a reference arm including a reference element; a detector arm including a detector; and a beam splitter, the reference element having one or more mirrored zones. Consequently, component parts which have undercut surfaces in the illumination direction can be measured in a single measuring operation.

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Nilüfer/Bursa, Turkey

Rahmi Gencoglu