Applied Materials, Inc.

Rafika Smati

Srinivas D Nemani

Qiwei Liang

Adib M Khan

Sultan Malik

Joseph Ng

John O'Hehir

Embodiments of the present disclosure relate to gas abatement apparatus and effluent management. The apparatus described herein include a high pressure process chamber and a containment chamber surrounding the process chamber. A high pressure fluid delivery module is in fluid communication with the high pressure process chamber and is configured to deliver a high pressure fluid to the process chamber. An effluent management module includes a muffler assembly to effluent pressure reduction and a plurality of scrubbers provide for treatment of effluent.

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Santa Clara, CA, United States of America

Rafika Smati