Varian, Inc.

Raffaella Caretto

Fausto Casaro

A vacuum pump (11) comprises a body (1), a rotor member (9) having a plurality of rotor disks (12) coupled to corresponding plurality of stator rings integral to the body (1). The rotor, member has an axial bell-shaped cavity (13). A rotating shaft (15) and an electric motor (7, 8) are disposed within the axial bell-shaped cavity (13). The rotating shaft (15) is supported by rotation supporting means (5a, 5b). The electric motor comprises a stator (7) integral to the body (1) of the vacuum pump (11) and a rotor (8) coupled to the internal surface of the axial bell-shaped cavity (13) of the rotor member (9).

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Cuceglio, Italy

Raffaella Caretto