Endress+hauser Gmbh+co. Kg

Endress+hauserse+co. Kg

Endress + Gmbh + Co. Kg

Rafael Teipen

Sergej Lopatin

Benjamin Lemke

Anh Tuan Tham

Timo Kober

Igor Getman

Peter Klofer

Michael Philipps

Benjamin Mack

Peter Klöfer

Lars Karweck

Dieter Stolze

Thomas Zieringer

Roland Werthschützky

Stefan Rummele-Werner

Frank Passler

Peter Nommensen

Thomas Link

Michael Noack

Darina Riemer Woyczehowski

Bernhard Jochem

Frank PÄßLER

Darina Woyczehowski

Sandra Hildebrandt

A MEMS sensor with improved overload resistance for metrological registering of a measured variable comprises a plurality of layers, especially silicon layers, arranged on one another. The layers include at least one inner layer, which is arranged between a first layer and a second layer, and in the inner layer there is provided extending perpendicularly to the plane of the inner layer through the inner layer at least one cavity, on which borders externally at least sectionally and forming a connecting element, a region of the inner layer, which is connected with the first layer and the second layer. A lateral surface of the connecting element externally at least sectionally bordering the cavity has in an end region facing the first layer a rounding decreasing the cross sectional area of the cavity in the direction of the first layer, and has in an end region facing the second layer a rounding decreasing the cross sectional area of the cavity in the direction of the second layer.

MEMS sensor, especially pressure sensor, for metrological registering of a measured variable

A pressure difference sensor for providing a pressure measurement signal, comprising: a pressure difference measuring cell, which is suppliable with first and second pressures and which outputs the pressure measurement signal; first and second ceramic stiffening elements, each of which is joined with the pressure difference measuring cell and has a duct, via which the first, respectively the second, pressure is suppliable to the pressure difference measuring cell; a platform with first and second pressure input openings, each of which extends from a first surface to a second surface of the platform, wherein the pressure input openings are sealed on the first surface, each with its own isolating diaphragm, and first and second pressures tubes, which are arranged between the stiffening elements and the platform, and wherein each of the first pressure tube and the second pressure tube has at least one bend in a region between the platform and a first, respectively second, connecting area of the corresponding pressure tube.

Pressure difference sensor for providing a pressure measurement signal

A pressure difference sensor includes first and second counterelectrodes, a conductive disk between the counterelectrodes, a first insulating layer connecting an outer edge of the disk with an outer edge of the first counterelectrode forming a first pressure chamber, a second insulating layer connecting an outer edge of the disk with an outer edge of the second counterelectrode forming a second pressure chamber, an opening in the first counterelectrode, via which the first pressure chamber is contactable with a first pressure, and an opening in the second counterelectrode, via which the second pressure chamber is contactable with a second pressure. The disk is divided into inner and outer regions, the inner region includes a measuring membrane arranged between the two pressure chambers and an edge region, the inner region forms with each of the counterelectrodes a capacitor having a capacitance dependent on a pressure difference acting on the measuring membrane.

Capacitive pressure difference sensor and method for its manufacture

A high-precision pressure sensor, having a first base body that has two electrically conductive layers and an insulation layer arranged between the two layers and electrically insulating the two layers from one another, an electrically conductive measurement membrane arranged on the first base body with inclusion of a pressure chamber, which measurement membrane can be charged with a pressure to be measured, and an electrode provided in the membrane-facing layer and spaced apart from the measurement membrane, which electrode together with the measurement membrane forms a capacitor having a capacitance that varies according to the pressure acting upon the measurement membrane. The first base body is characterized in that it has a measurement membrane terminal via which a reference potential can be applied to the measurement membrane, an electrode terminal via which an electrode potential of the electrode can be tapped, and a shield terminal via which a shield potential that can be predetermined independently of the reference potential especially, a shield potential corresponding to the electrode potential can be applied to the layer facing away from the membrane.

Capacitive pressure sensor and method for its production

A pressure sensor includes a sensor body with a sensor chamber in the interior, at least a first separating membrane, forming a first separating membrane chamber connected with the sensor body. A measuring membrane divides the sensor chamber into two chamber portions. A pressure transfer liquid, with which the first separating membrane chamber, the first chamber portion and a channel therebetween are filled, in order to transfer a pressure to the measuring membrane; wherein the pressure sensor is specified for a temperature range between a minimum temperature and a maximum temperature, as well as for a pressure range. At the minimum temperature, the pressure transfer liquid volume in the first chamber portion, the first channel and the first separating membrane chamber is sufficient over the total pressure range to transfer the pressure to the measuring membrane, without the first separating membrane coming to rest, and that when, in the case of overload at maximum temperature, the entire pressure transfer liquid volume moves out of the first separating membrane chamber into the first chamber portion, and is accommodated by the measuring membrane, the measuring membrane experiences no plastic deformation.

Overload safe pressure sensor, especially pressure difference sensor

A pressure difference sensor, comprising a pressure difference measuring cell having a measuring membrane, two platforms, between which the measuring membrane is arranged, and a transducer, as well as an elastic clamping apparatus, which has two clamping areas, each of which acts on a respective rear side of the platform facing away from the measuring membrane. The clamping apparatus has at least one elastic element, via which the clamping areas are mechanically coupled, in order to clamp the pressure difference measuring cell with an axial clamping force. The clamping areas are rigid, wherein the clamping apparatus comprises a clamp with two clamping bodies, each of which has one of the clamping areas. At least one of the clamping bodies has an elastic element, the clamping bodies are connected with one another under stress, in order to exert a clamping force on the pressure difference measuring cell, wherein the two clamping bodies have a central, form retaining section, which includes the clamping areas. On the form retaining section of at least one clamping body, especially both clamping bodies, elastic sections adjoin, which form the elastic elements.

Pressure difference sensor with protection against static overloads

A differential pressure sensor comprises a measuring diaphragm made of an electrically conductive material, two electrically insulating mating bodies, and at least one capacitive transducer. The measuring diaphragm is connected to the mating bodies in a pressure-tight manner with the formation of a measuring chamber in each case along a circumferential edge. The mating bodies each have a diaphragm bed which is concave in the center, wherein the mating bodies each have a pressure channel which extends through the mating body into the measuring chamber. The capacitive transducer has at least one mating body electrode which is formed by a metallic coating of the surface of the mating body in the region of the diaphragm bed and with which contact can be made by a metallic coating of the wall of the pressure channel. The mating body electrode is formed by an inner region of the metallic coating, which inner region is annularly enclosed by an outer region of the coating and is separated from the latter by an annular insulation region.

Differential pressure sensor

A hydraulic measuring mechanism for registering pressure differences, comprising a measuring mechanism platform having a process connection surface and two pressure input openings, in which, in each case, a pressure tube is arranged, which protrudes from a rear side of the measuring mechanism platform to support a pressure difference measuring cell, wherein the pressure tubes are connected pressure-tightly with the measuring mechanism platform from the process connection surface.

Hydraulic measuring mechanism with coplanar pressure inputs and pressure difference sensor having such a measuring mechanism

A pressure difference sensor includes a pressure difference measuring cell, which has a measuring cell platform with pressure contactable measuring chambers in its interior, a first mounting surface and a second mounting surface. The mounting surfaces have a variable separation under pressure loading of the measuring chambers. A first reinforcement element with a first planar reinforcement area and a second reinforcement element with a second planar reinforcement area. A deflection of the mounting surfaces due to a pressure loading of the measuring chambers is lessened by the reinforcement elements, wherein especially at least 50% of an effective stiffness K=1/(dx/dp) of the reinforcement elements connected by the pressure difference measuring cell is provided only by these connections of the reinforcement element with the measuring cell platform without additional connections between the reinforcement elements in a parallel branch, wherein x is the separation between the first mounting surface and the second mounting surface having the greatest pressure dependence dx/dp.

Mechanical stabilizing and electrical as well as hydraulic adapting of a silicon chip by ceramics

A pressure difference sensor includes a measuring membrane, which is arranged between two platforms and connected pressure-tightly with the platforms, in each case, via a first insulating layer for forming pressure chambers between the platforms and the measuring membrane. The insulating layer is especially silicon oxide, wherein the pressure difference sensor further includes an electrical transducer for registering a pressure dependent deflection of the measuring membrane. The platforms have support positions, against which the measuring membrane lies at least partially in the case of overload, wherein the support positions have position dependent heights, characterized in that the support positions are formed in the first insulating layer by isotropic etching, and the particular height h of a support position, in each case, is a function of a distance from a base of the support position in the reference plane.

Pressure difference sensor and method for its manufacture

A pressure difference sensor includes a capsule, which has a ceramic capsule body. The capsule has a transducer seat in its interior, wherein there is arranged in the transducer seat a semiconductor pressure measuring transducer core, which has a measuring membrane body and at least one support body. The measuring membrane body is connected pressure-tightly with the at least one support body, which has a pressure inlet opening. Ducts extend respectively from an outer surface of the capsule into the transducer seat, wherein the pressure inlet opening communicates with the first duct A side of the measuring membrane is contactable with a pressure through the pressure inlet opening, wherein the support body contacts a joint, which surrounds the first pressure inlet opening and the opening of the first duct into the transducer seat and is connected pressure-tightly with a wall of the transducer seat, and wherein a second side of the measuring membrane is hydraulically isolated from its first side and communicates with the second duct.

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Berlin, Germany

Rafael Teipen