Nikon Metrology Nv

Raf Nysen

Frank Thys

Patrick Blanckaert

Hans Thielemans

Geert Vandenhoudt

Laurens Van Horenbeek

The present invention provides a dimensional measurement probe unit () for attachment to a probe head () of a localizer (), comprising: a measurement probe () for dimensional measurement of an object (); a revolute joint () integrated into the measurement probe (); and a probe unit interface () for repeated dismountable connection to a probe head () wherein the probe unit interface () is revolutely connected to the measurement probe () by the revolute joint ().

Measurement probe unit for metrology applications

The present invention relates to a scanning probe () for the dimensional acquisition of an object () by irradiating the object () with light and detecting reflected light comprising: a detection unit () comprising an imaging sensor () and a sensor lens assembly () for detecting the reflected light, a light projecting unit () comprising a light source () for generating light, and source optics () for focusing the light, and light plane generating optics () for generating a light plane () for irradiating the object, and an adjustment mechanism () comprised in the light projecting unit (), for adjusting the position or orientation of the light plane relative to the detection unit. It further relates to a method for assembly of a scanning probe ().

Growing community of inventors

Veltem-Beisem, Belgium

Raf Nysen