Industrial Technology Research Institute

Raey-Shing Huang

Ming-Jye Tsai

Ching-Yi Wu

Ruei-Hung Jang

Yue-Min Wan

Cheng-Jien Peng

Chun-Hsu Ke

A flow controller module comprising at least one micro flow sensor and a microvalve, integrated in a micro flow channel, is disclosed. The micro flow sensor comprises a pressure sensitive flow sensor. At the position of the micro flow sensor, the micro flow channel is provided with an orifice so that pressure of a flow may be enlarged to facilitate measurement of the flow speed. The microvalve comprises a silicon microbridge with a mesa structure and is driven by a voltage. The microvalve may operate under a normally closed mode or a normally open mode. Disclosed in this invention is also a flow sensor suited in the integrated flow controller module. Methods for preparing the flow sensor and the flow controller module are also disclosed.

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Hsinchu, Taiwan

Raey-Shing Huang