Credence Systems Corporation

Dcg Systems Gmbh

Radu Ispasoiu

James S Vickers

Steven Kasapi

Kenneth R Wilsher

Gary Leonard Woods

William K Lo

Thomas R Gockel

Nina Boiadjieva

Nagamani Nataraj

An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

Apparatus and method for probing integrated circuits using laser illumination

An integrated housing for a lens and a photodetector, which is being cooled to low temperatures to enable the detector to detect faint emission of photons. An enclosure is provided to which a lens is affixed from one side using a retaining ring, and a photodetector is affixed from the opposite side. The enclosure is affixed to a TE cooler. The enclosure and the retaining ring are made from materials having similar thermal expansion coefficients.

Lens mount integrated with a thermoelectrically cooled photodetector module

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Los Gatos, CA, United States of America

Radu Ispasoiu