Asml Netherlands B.v.

Radu Donose

Frits Van Der Meulen

Christiaan Louis Valentin

Alain Louis Claude Leroux

Alexander Marinus Arnoldus Huijberts

Dries Vaast Paul Hemschoote

Joost De Hoogh

Johannes Franciscus Martinus Van Santvoort

Robert Coenraad Wit

A system having a sub-system that is configured to change a thermal condition of a physical component from a set-point to a new set-point, wherein the sub-system includes: a mixer operative to receive a first conditioning fluid having a first temperature and a second conditioning fluid having a second temperature different from the first temperature, and operative to supply to the physical component a mix of the first conditioning fluid and the second conditioning fluid; and a controller configured to control the mixer in dependence on the new set-point. Also a method of operating a lithographic apparatus as well as a device manufactured using the system described herein or according to methods described herein.

Gas mixing for fast temperature control of a cooling hood

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Eindhoven, Netherlands

Radu Donose