Robert Boschgmbh

Radoslav Rusanov

Henrik Schittenhelm

Enno Baars

Michael Curcic

Andy Tiefenbach

Uwe Glanz

Oliver Krayl

Christoph Daniel Kraemmer

Martin Buchholz

Michael Scholl

Sonja Knies

Markus Schreiber

Tobias Werner

Matthias Wichmann

Benno Roesener

Johannes Weber

Jens Ehlermann

Sabine Nagel

Simon Genter

Fabian Purkl

Panagiotis Gedeon

A particle sensor for detecting particles in a flow of a measuring gas for detecting soot particles in an exhaust gas channel of a burner or of an internal combustion engine. The particle sensor includes a device for generating or for supplying laser light, a device for focusing laser light, and a device for detecting or transferring thermal radiation. The particle sensor includes at least one optical access, which separates an area exposed to the measuring gas from an area facing away from the measuring gas not exposed to the measuring gas, the device for generating or supplying laser light and/or the device for detecting or for transferring thermal radiation being situated in the area facing away from the measuring gas, wherein the particle sensor removes a sub-flow from the measuring gas flow and supplies it to the laser focus and further fluidically shields the optical access from the sub-flow.

Optical particle sensor, in particular, exhaust gas sensor

A particle sensor is described. The particle sensor includes a laser module having a laser, and a detector configured to detect thermal radiation. The particle sensor has an optical apparatus that is configured to focus laser light proceeding from the laser module into a first spot and is configured to focus thermal radiation proceeding from the first spot into a second spot, a radiation-sensitive surface of the detector being located in the second spot, or behind the second spot in the beam path of the thermal radiation focused onto the second spot.

Laser-induced incandescent particle sensor comprising a confocal arrangement of a laser spot and of a thermal radiation spot

A method for producing an electromigration-resistant crystalline transition-metal silicide layer of a layer sequence, for example, to provide a micro heater includes, supplying a semiconductor substrate including an electrically insulating layer; physically depositing a transition metal on the electrically insulating layer; carrying out a plasma-enhanced chemical vapor deposition while forming an inert gas plasma; conveying monosilane to the inert gas plasma, with the monosilane decomposing into silicon and hydrogen and the silicon in the gaseous phase entering into a chemical reaction with the transition metal in order to form the electromigration-resistant crystalline transition-metal silicide layer.

Method for producing an electromigration-resistant crystalline transition-metal silicide layer, a corresponding layer sequence, and a micro heater

A soot particle sensor includes a laser module including a laser and a detector configured for the detection of temperature radiation. The soot particle sensor provides that the laser is configured to generate laser light, and the soot particle sensor includes an optical element situated in the beam path of the laser of the laser module, which is configured to bundle laser light originating from the laser module in a spot, and the detector is situated in the soot particle sensor so that it detects the radiation originating from the spot.

Optical soot particle sensor for motor vehicles

A heating apparatus for a MEMS sensor, comprising a metallic supply lead element for electric current; a metallic return lead element for electric current; and a defined number of metallic heating elements configured between the supply lead element and the return lead element, a substantially constant electrical current density being configurable in the supply lead element, in the return lead element, and in the heating elements.

Heating apparatus for a MEMS sensor

Growing community of inventors

Stuttgart, Germany

Radoslav Rusanov