Texas Instruments Corporation

R Scott Croff

Robert G McKenna

Edwin L Tom

A method and apparatus ( ) for securing a fragile wafer ( ) to a wafer tape ( ) secured taut across a wafer frame ( ). A gentle point force ( ) is provided by a roller wheel ( ) mounted on a rotatable arm ( ) to securely adhere the wafer tape ( ) to the backside of the wafer ( ). Preferably, a spiral pattern ( ) is formed by the rotating roller ( ) to secure the wafer tape ( ) to the wafer ( ) to avoid forming air bubbles or creases between the wafer tape and wafer. The method and apparatus is especially suitable for securely adhering fragile wafers to wafer tape that are to be subsequently broken along kerfs.

Method of adhering a wafer to wafer tape

A method and apparatus (,) for breaking a wafer (,) into die (,) having a high aspect ratio. In one embodiment, a multi-radii dome (,) is utilized to controllably break the wafer in two directions. The two different dome curvatures (R1, R2) provide an even, controlled, force along the kerfs in both the X-direction and the Y-direction. In another embodiment, a cylindrical dome (,) being curved (R3) in the Y-direction and flat in the X-direction is used to break a wafer into die having exceptionally high aspect ratios. The present invention reduces the likelihood of die fracture in the long dimension during the wafer break process. The wafer (,) is mounted on stretchable wafer tape (,) during the break process to prevent the die edges from contacting and rubbing with one another after the break process. The present invention allows separation of die of exceptionally large aspect ratios such as those having a 1:25 aspect ratio.

Method of breaking and separating a wafer into die using a multi-radii dome

A method and apparatus (,) for breaking a wafer (,) into die (,) having a high aspect ratio. In one embodiment, a multi-radii dome (,) is utilized to controllably break the wafer in two directions. The two different dome curvatures (R,R,) provide an even, controlled, force along the kerfs in both the X-direction and the Y-direction. In another embodiment, a cylindrical dome (,) being curved (R,) in the Y-direction and flat in the X-direction is used to break a wafer into die having exceptionally high aspect ratios. The present invention reduces the likelihood of die fracture in the long dimension during the wafer break process. The wafer (,) is mounted on stretchable wafer tape (,) during the break process to prevent the die edges from contacting and rubbing with one another after the break process. The present invention allows separation of die of exceptionally large aspect ratios such as those having a 1:25 aspect ratio.

Method and apparatus for breaking and separating a wafer into die using a multi-radii dome

A method and apparatus (10) for securing a fragile wafer (16) to a wafer tape (26) secured taut across a wafer frame (24). A gentle point force (72) is provided by a roller wheel (36) mounted on a rotatable arm (30) to securely adhere the wafer tape (26) to the backside of the wafer (16). Preferably, a spiral pattern (70) is formed by the rotating roller (36) to secure the wafer tape (26) to the wafer (16) to avoid forming air bubbles or creases between the wafer tape and wafer. The method and apparatus is especially suitable for securely adhering fragile wafers to wafer tape that are to be subsequently broken along kerfs.

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Allen, TX, United States of America

R Scott Croff