Average Co-Inventor Count = 5.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Fsi International, Inc. (2 from 102 patents)
2 patents:
1. 7134827 - Reduced footprint tool for automated processing of microelectronic substrates
2. 6979165 - Reduced footprint tool for automated processing of microelectronic substrates