Imec Vzw

Trading Technologies International, Inc.

Imec USA Nanoelectronics Design Center

Quentin Paul Herr

Anna Yurievna Herr

Zsolt Tokei

Anshul Gupta

Henry Luo

A method for forming a superconducting interconnect structure, comprising: providing a substrate, forming a superconductive layer, forming a layer of a first dielectric material, removing parts of the layer of the first dielectric material and of the superconductive layer so as to form a pattern comprising a first set of line structures comprising: a first set of superconductive line structures, and a first set of line structures made of the first dielectric material, forming a second dielectric material between the line structures of the first set, forming a layer formed of a third dielectric material, providing a patterned mask, transferring the pattern into the first dielectric material and into the layer formed of the third dielectric material, so as to form the at least one via hole, removing the patterned mask, and forming a superconductive material layer so as to form at least one via.

Superconductive interconnect structure

Josephson junction based logic devices and methods for their use are described. An example Josephson junction based logic device includes a two-input OR/AND (OA2) gate. The OA2 gate includes a first input node inductively coupled to a first input source and a second input node inductively coupled to a second input source. The first and second input sources are configured to provide single-flux-quantum (SFQ) pulses. The OA2 gate also includes first plurality of inductors coupled between the first input node and one of: a first output node or a second output node. The OA2 gate additionally includes a second plurality of inductors coupled between the second input node and one of: the first or the second output nodes. The OA2 gate also includes Josephson junctions coupled between a common node and one of: the first or the second input node, or the first or the second output node.

SFQ-based pulse-conserving logic gates

A fabrication stack comprises at least one Josephson junction, at least one capacitor, and one or more high kinetic inductance wires that comprise NbTiN. The one or more high kinetic inductance wires are configured to electrically couple the at least one Josephson junction to the at least one capacitor to form a superconducting circuit that facilitates switching a state of the Josephson junction via a single flux quantum (SFQ) pulse.

Fabrication stack for high integration density superconducting digital circuits

Josephson junction based memory devices and methods for their use are described herein. An example Josephson junction based memory device includes a plurality of superconducting loops. Each superconducting loop includes at least one Josephson junction. The plurality of superconducting loops are electrically coupled. The plurality of superconducting loops include a plurality of input loops, a plurality of readout loops, and at least one shared loop. The plurality of superconducting loops are configured to store or annihilate magnetic flux quanta in one or more of the superconducting loops in response to a combination of control signals and single flux quantum (SFQ) pulses.

Josephson static random access memory

A superconducting circuit comprises a resonator and a Josephson junction. The resonator comprises an inductor and a capacitor. The inductor comprises a first terminal and a second terminal. The second terminal of the inductor is electrically coupled to a first terminal of the capacitor. A second terminal of the capacitor is electrically coupled to a first terminal of the Josephson junction. The terminal shared by the inductor and the capacitor is configured to be electrically coupled to an alternating current (AC) voltage source having a particular frequency and particular phase. The inductance of the inductor and the capacitance of the capacitor are selected to cause the resonator to resonate at a frequency and a phase that substantially match the particular frequency and the particular phase, respectively, of the AC voltage source to facilitate switching a state of the Josephson junction via a single flux quantum (SFQ) pulse.

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Leuven, Belgium

Quentin Paul Herr