Kla Tencor Corporation

Quang Giang

Ilya Bezel

Kenneth P Gross

Matthew Derstine

Anant Chimmalgi

Rudolf C Brunner

Lauren Wilson

Rajeev Patil

Jincheng Wang

Younus Vora

Erik Kim

Daniel Scott

Ken Gross

Dan Scott

Cedric Lasfargues

A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures

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San Francisco, CA, United States of America

Quang Giang