Shanghai Micro Electronics Equipment (group) Co., Ltd.

Shanghai Micro Electronics Equipment Co., Ltd.

Qixin Xu

Lingyu Li

Fan Wang

Rong Du

A robotic manipulator for handling a cassette and an automated cassette transport device are disclosed, the device including a mechanical arm (), an end actuator () at an end of the mechanical arm () and a vision-based locating assembly () on the end actuator (). On the one hand, the vision-based locating assembly () can determine the position of a flange of the cassette, thereby identifying the cassette. In other words, the cassette can be identified based on a feature of the cassette itself. This dispense with a separate locating marker while improving cassette measuring and handling accuracy. On the other hand, transportation of the cassette is allowed by complementary retention of its flange on a recessed surface of the end actuator ().

Robot arm for holding cassette and automatic cassette transfer device

A cassette transport device is disclosed which includes a smart cart, a base expansion frame mounted on the smart cart and a cassette-loading frame fixed to the base expansion frame. The cassette-loading frame is partitioned into several segments each accommodating a plurality of cassette trays. Each of the cassette trays defines, on its surface, a first trough and a second trough in the first trough. The first trough is configured to retain a cassette of a first size, and the second trough is configured to retain a cassette of a second size. With the first and second troughs, each of the cassette trays is able to retain a cassette of either the first or second size, making the cassette transport device possible to be used in transportation of the both types of cassettes with a high yield. Moreover, the smart cart is capable of automated transportation without human intervention or track construction while enabling savings in transportation cost, time and labor.

Wafer box conveyor

An interference exposure device, including: a light source () for providing an exposure light beam; a light homogenizer-collimator () for homogenizing and collimating the exposure light beam; an interference unit () including at least two gratings () for converting the exposure light beam into at least two coherent light beams and making the coherent light beams converge on a substrate surface to form thereon an interference exposure pattern, the gratings () each having a period and being distributed in correspondence with a desired exposure pattern; a driving and supporting means () for supporting and carrying the substrate to move with at least three degrees of freedom; and a measuring element () for measuring an angle between coordinate systems of the interference unit () and the means () to adjust an exposure position of the means () based on a measurement result of the measuring element () before exposing the substrate.

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Shanghai, China

Qixin Xu