Huaqiao University

Qiufa Luo

Xipeng Xu

Jing Lu

Yanhui Wang

Zhongqiang Ma

Zhiping Xue

Ping Xiao

Yongchao Xu

Dekui Mu

Dayu Zhang

Yueqin Wu

Forming an amorphous carbon layer due to lattice distortion of carbon atoms on a surface layer of a single-crystal diamond under a mechanical shear function of a hard abrasive, and generating a chemical reaction between the amorphous carbon layer on the surface layer and the reactive abrasive to achieve quickly removing carbon atoms on the surface layer of the single-crystal diamond due to a local high temperature between abrasive grains and the single-crystal diamond caused by friction at a high speed.

Method for polishing single-crystal diamond

Carbon atoms of a single-crystal diamond and active abrasives are used to produce a chemical reaction to form carbides under a specific grinding condition of no higher than a graphitization temperature, and a hard abrasive is used to remove the carbides.

Method for grinding single-crystal diamond

A method for testing an interfacial tribochemical reaction between a diamond wafer and active metal abrasive or metal oxide abrasive is provided. A surface of a diamond indenter used in a nano scratch tester is coated with a layer of the active metal abrasive or the metal oxide abrasive with uniform and controllable thickness by magnetron sputtering, and an interface interaction between the layer of the active metal abrasive or the metal oxide abrasive and the diamond wafer is controlled by a scratch test of the diamond wafer. Chemical components of an interaction section on a surface of the diamond wafer are analyzed by the scanning probe micro Raman spectrometer.

Method for testing interfacial tribochemical reaction between abrasive and diamond wafer

Disclosed is a composite abrasive with hard core and soft shell, comprising hard abrasive core with grain diameter in a range of 0.1&#x2dc;1 &#x3bc;m and a soft oxide shell with thickness in a range of 5&#x2dc;100 nm, the grain size of the oxide of the soft oxide shell is in a range of 5&#x2dc;20 nm, the composite abrasive is obtained from aqueous solution of oxide inorganic salt precursor and the hard abrasive by dispersing, constant temperature reflux hydrolyzing, solid-liquid separating, washing and drying. The component abrasive with hard core and soft shell of the present invention can improve the manufacturing efficiency and the surface quality during the ultraprecise manufacturing of the sapphire substrate.

Composite abrasive with hard core and soft shell, manufacturing method and application method

Growing community of inventors

Quanzhou, China

Qiufa Luo