Praxair Technology, Inc.

Qiong Guo

Ashwini K Sinha

Aaron Reinicker

Ronald F Spohn

Ranko Bursac

Ozlem Yardimci

Stanley M Smith

Shawn M Cecula

William R Gerristead

Heng Zhu

A novel method and system for using certain tin compounds as dopant sources for ion implantation are provided. A suitable tin-containing dopant source material is selected based on certain attributes. Some of these attributes include stability at room temperature; sufficient vapor pressure to be delivered from its source supply to an ion chamber and, the ability to produce a suitable beam current for ion implantation to achieve the required implant Sn dosage.

Tin-containing dopant compositions, systems and methods for use in ion implantation systems

A novel method and system for using certain tin compounds as dopant sources for ion implantation are provided. A suitable tin-containing dopant source material is selected based on one or more certain attributes. Some of these attributes include stability at room temperature; sufficient vapor pressure to be delivered from its source supply to an ion chamber and, the ability to produce a suitable beam current for ion implantation to achieve the required implant Sn dosage. The dopant source is preferably delivered from a source supply that actuates under sub atmospheric conditions to enhance the safety and reliability during operation.

Tin-containing dopant compositions, systems and methods for use in ION implantation systems

Disclosed are articles useful as the body of a container for containing gas under pressure, and containers which comprise the articles to which are affixed valves to control the flow of gas out of the container, wherein the articles comprise a hollow container body, having an external surface and having an opening through which gas can enter or leave the interior of the hollow container body; optionally but preferably a layer of fiber-reinforced polymer around the exterior of the container body, and an external layer of elastomer around and sealed to the external surface of the layer of fiber-reinforced polymer if present or else to the cylinder body.

Container for pressurized gas

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Clarence, NY, United States of America

Qiong Guo