Shanghai Micro Electronics Equipment (group) Co., Ltd.

Shanghai Micro Electronics Equipment Co., Ltd.

Qingsheng Chen

Liwei Wu

Hanchuan Ji

Lanzhou Yan

A magnetic gravity compensator comprises a stator (), a rotor (), a base () and an adjustment mechanism (). The stator () is disposed on the base (), and the rotor () is levitated with respect to the stator (). The stator () comprises a central cylindrical magnet () that is fixed to the base () by the adjustment mechanism () and consists of at least two arc magnets (). The adjustment mechanism () has a first end fixed to the base () and a second end securely connected to the at least two arc magnets (). The adjustment mechanism () is configured to drive the at least two arc magnets () to synchronously move radially with respect to a central axis of the central cylindrical magnet () so as to change a magnetic circuit between the central cylindrical magnet () and the rotor (), and thereby adjust a magnetic levitation force between the stator () and the rotor ().

Adjustable magnetic buoyancy gravity compensator

A linear motor includes a magnet unit and a coil unit. The magnet unit includes two magnet arrays oppositely parallel and symmetrically located on a magnetic yoke: a first and a second magnet array. The coil unit is disposed in a magnetic gap between the two magnet arrays. In a spatial rectangular coordinate system defined by X, Y and Z axes, the coil unit includes a first and a second coil array arranged in a stacked manner in the Z-axis direction and staggered from each other by a distance of &#x394;P in the Y-axis direction. &#x394;P satisfies: when a control system charges the coil unit with a desired current, the coil unit generates a control force along the Y-axis direction, another control force along the Z-axis direction, and a moment about the X-axis direction, which may reduce a magnetic flux leakage and provide higher driving forces, making the linear motor generate required three degrees-of-freedom control force or control torque, and further improve vertical and horizontal magnetic fluxes in the magnet array.

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Shanghai, China

Qingsheng Chen