Boe Technology Group Co., Ltd.

Hefei Xinsheng Optoelectronics Technology Co., Ltd.

Qing Tong

Yong Yang

Weijing Liao

This invention provides a lamp device, a substrate cleaning apparatus and an operation method thereof, wherein the lamp device comprises a plurality of lamps and a plurality of connection structures, and every two adjacent lamps are provided with one connection structure therebetween, wherein each lamp is provided with a first recess and a second recess along a direction in which the plurality of lamps are arranged, one end of each connection structure is positioned into the first recess of one of two adjacent lamps and the other end of the connection structure is positioned into the second recess of the other one of the two adjacent lamps. With this configuration, the connection structures do not protrude from the surfaces of the far ultra-violet lamps, and thus the glass substrate is prevented from being scratched, and both the yield of the display panels and capacities of removing organic substances are increased.

Lamp device, substrate cleaning apparatus and operation method thereof

A heat recovery device and an alignment film curing system. The heat recovery device can be provided outside a heating device, and it includes a first recovery unit including a first chamber and a first communicating pipe that is provided in the first chamber. The first chamber has a first gas inlet and first gas outlet, a first waste gas inlet and a first waste gas outlet, and the first communicating pipe is arranged in a winding way and connected between the first gas inlet and the first gas outlet in an enclosed way. The first gas inlet is connected to a gas supply pipe of the heating device, the first gas outlet is connected to an intake pipe of the heating device, the first waste gas inlet is connected to an exhaust pipe of the heating device, and the first waste gas outlet is configured to discharge waste gas.

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Beijing, China

Qing Tong