Osaka University

Qincui Gu

Noriaki Miyanaga

Yasukazu Izawa

Katsunobu Nishihara

Takayoshi Norimatsu

Keiji Nagai

Hiroaki Nishimura

Shinsuke Fujioka

The present invention is made to provide an extreme ultraviolet light source target or an X-ray source target having a good operationality. An extreme ultraviolet light source target in accordance with an aspect of the present invention is obtained by including a heavy metal such as tin into a matrix made of a polymeric material such as hydroxylpropylcellulose (HPC). The target can be manufactured by mixing the heavy metal and the polymeric material with a solvent, and evaporating the solvent. Since the target uses the polymeric material as a matrix, the target can be easily deformed to have a desired shape. For this reason, the target can be easily attached to a target holder irrespective of the shape of the holder, resulting in a good operationality of the target. Furthermore, an emission efficiency can be improved by including the heavy metal at a low density.

Extreme ultraviolet light and X-ray source target and manufacturing method thereof

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New York, NY, United States of America

Qincui Gu