Changxin Memory Technologies, Inc.

Beijing Superstring Academy of Memory Technology

Hefei University of Technology

Qiang Zhang

Zhan Ying

Xiaoguang Wang

Huihui Li

Yiming Zhu

Hsin-Pin Huang

Minmin Wu

Mengmeng Wang

Shan Wang

Xingsong Su

Shanlin Yang

Pan Yuan

Xiaojian Ding

Yuanhang Wang

Chunhui Wang

Xianghong Hu

Ting Huang

Embodiments relate to the field of semiconductor manufacturing technology, and more particularly, to a method for fabricating a semiconductor structure and a semiconductor structure. The method for fabricating a semiconductor structure provided by the embodiments of the present disclosure includes: providing a substrate including an array region and a peripheral region; forming a first mask layer covering the array region and the peripheral region on the substrate; forming a first device structure pattern on the first mask layer, and then forming a second device structure pattern on the first mask layer; and etching the substrate by using the first device structure pattern and the second device structure pattern as mask layer to form a peripheral region structure and an array region structure synchronously on the substrate. Technological processes are simplified, fabrication difficulties are reduced, and production efficiency is improved.

Method for fabricating semiconductor structure, and semiconductor structure

Embodiments relate to the field of semiconductor manufacturing technology, and more particularly, to a method for fabricating a semiconductor structure and a semiconductor structure. The fabricating method includes: providing a substrate including an array region and a peripheral region; and forming, on the substrate, a first mask layer covering the array region and the peripheral region, the first mask layer having a first device structure pattern directly facing the array region and a second device structure pattern directly facing the peripheral region. Through the method for fabricating a semiconductor structure, the first mask layer having the first device structure pattern and the second device structure pattern is formed on the substrate, and then the substrate is etched by using the first device structure pattern and the second device structure pattern as mask layer to synchronously form a peripheral region structure and an array region structure on the substrate.

Method for fabricating semiconductor structure and semiconductor structure

A method for manufacturing a semiconductor structure includes: providing a substrate, a bottom protecting wall being formed in the substrate; forming a mask layer on the substrate; forming a groove in the mask layer, a non-zero angle existing between a sidewall of the groove and a sidewall of the bottom protecting wall, and the bottom of the groove extending into the substrate; and forming a top protecting wall in the groove, the top protecting wall being in direct contact with the bottom protecting wall.

Method for manufacturing semiconductor structure, and semiconductor structure

Embodiments of the present disclosure provide a semiconductor structure and a manufacturing method thereof. The manufacturing method includes: providing a base; forming a bottom electrode layer on the base, wherein a crystal structure of the bottom electrode layer includes a tetragonal crystal system; forming a first dielectric layer on a surface of the bottom electrode layer by using the bottom electrode layer as a seed layer, wherein a crystal structure of the first dielectric layer includes a tetragonal crystal system; and forming a first current blocking layer on a surface of the first dielectric layer.

Semiconductor structure and manufacturing method thereof

A deep learning fault diagnosis method includes the following steps: a fault diagnosis data set X is processed based on sliding window processing, to obtain a picture-like sample data set {tilde over (X)}, and obtain an attention matrix A of the picture-like sample data set {tilde over (X)}; and a 2D-CNN model is constructed to process the picture-like sample data set {tilde over (X)} to obtain a corresponding feature map F, and in the meantime, the feature map F is processed based on channel-oriented average pooling and channel-oriented maximum pooling to obtain an output Pof the average pooling and an output Pof the maximum pooling, and a weight matrix W is obtained based on the attention matrix A, the output Pof the average pooling, and the output Pof the maximum pooling, so that an output of the model is a feature map {tilde over (F)} based on an attention mechanism, where {tilde over (F)}=WF.

Deep learning method integrating prior knowledge for fault diagnosis

The disclosure provides a method for manufacturing a semiconductor structure and the semiconductor structure. The method for manufacturing the semiconductor structure comprises: a substrate, in which a first protective structure is formed, is provided; a first dielectric layer is formed on the substrate; and a second protective structure is formed in the first dielectric layer and the substrate. A projection of the second protective structure and a projection of the first protective structure in a direction perpendicular to a surface of the substrate are at least partially overlapped, and there is a spacing between a projection of the second protective structure and a projection of the first protective structure in a direction along the surface of the substrate.

Method for manufacturing semiconductor structure and semiconductor structure

A method for manufacturing a semiconductor structure includes: providing a substrate, the substrate includes a plurality of first trenches and a first pattern having an array of lines each formed between adjacent two of the plurality of first trenches; forming a first dielectric layer to cover at least the sidewalls of each of the lines in the array of the first pattern; and each of the lines in the array of the first pattern is segmented to form elements of a second pattern.

Semiconductor device and a method making the same

A memory formation method includes: providing a substrate; forming a first mask layer on the substrate, in the first mask layer there being formed a plurality of parallel-arranged strip-shaped patterns positioned above the array area, and an end of each of the strip-shaped patterns being connected to the first mask layer on the peripheral area of the substrate; forming a second mask layer on the first mask layer, in the second mask layer there being formed a plurality of first patterns; and etching layer by layer by using the second mask layer and the first mask layer as masks to transfer the strip-shaped patterns and the first patterns into the substrate to form the discrete active areas arranged in an array.

Memory and formation method thereof

The present invention provides a semiconductor manufacturing method. A substrate having a plurality of first trenches can be provided. The substrate can include a first pattern formed between two adjacent first trenches. A first dielectric layer can be deposited onto the substrate. The first dielectric layer can cover at least one side wall of the first pattern. A second dielectric layer can be deposited onto the substrate. The second dielectric layer can fill the first trenches. The first pattern can be severed to form a second pattern on the substrate. The second dielectric layer can be removed from the first trenches.

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Hefei, China

Qiang Zhang