Samsung Electronics Co., Ltd.

Applied Materials, Inc.

Other

Pyongwon Yim

Visweswaren Sivaramakrishnan

Hyung Jai Lee

Surinder S Bedi

Mario David Silvetti

Indrajit Lahiri

Hae Sung Kwon

Tom K Cho

Haesung Kwon

Tho Pham

Andrzej Kaszuba

Sophia M Velastegui

Vinay K Shah

Satish Sundar

Gregory Tran

Shiao-Hua Chen

Weonwoo Kim

Andrew S Kao

Venkatesh Babu

Douglas Kitajima

Sangeun Baek

Yonkyu Byun

Wonshik Chee

Yongkyu Byun

George Wakatsuki

In one embodiment, the invention is a guard ring for reducing particle entrapment along a moveable shaft of a substrate support. In one embodiment, the guard ring comprises a substantially annular guard ring positioned within a step formed in a sleeve that circumscribes the shaft. The guard ring is positioned to substantially seal a gap separating the shaft from the sleeve, so that the amount of particles and foreign matter that travel within or become trapped in the gap is substantially reduced. In another embodiment, a guard ring comprises a base portion having an inner perimeter and an outer perimeter, a first flange coupled to the inner perimeter, a second flange coupled to the outer perimeter, and a continuous channel separating the first flange from the second flange. The first flange is adapted to function as a spring that accommodates displacement of the shaft.

Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support

A robotic positioning system that cooperates with a sensing system to correct robot motion is provided. The sensing system is decoupled from the sensors used conventionally to control the robot's motion, thereby providing repeatable detection of the robot's true position. In one embodiment, the positioning system includes a robot, a controller, a motor sensor and a decoupled sensor. The robot has at least one motor for manipulating a linkage controlling the displacement of a substrate support coupled thereto. The motor sensor is provides the controller with motor actuation information utilized to move the substrate support. The decoupled sensor provides information indicative of the true position the substrate support that may be utilized to correct the robot's motion.

Method and apparatus for monitoring the position of a semiconductor processing robot

A hard disk drive assembly that includes a device for limiting a movement of a head of a head gimbal assembly from a surface of a disk. The head is coupled to the disk and attached to a suspension of the head gimbal assembly. The invented device limits a distance that the head can move away from a surface of the disk. Limiting the distance that the head can move away from the surface of the disk, may reduce the impact force associated with the head slapping the disk, which may reduce damage associated with head slapping.

Device for reducing damage due to head slap within a hard disk drive

The present invention is a shock absorption mechanism for reducing the damage experienced by disk drives, including damage caused by a magnetic head contacting the surface of a magnetic disk, as a result of impact or shock forces experienced by the disk drive. In general, the invention is a means for partially isolating a disk assembly and a related actuator assembly from other parts of the disk drive. In the preferred embodiment the shock absorption mechanism isolates the disk assembly and the actuator assembly from the outer frame of a housing containing the disk assembly and the actuator assembly by establishing a shock energy dissipation and absorption region between a pair of isolation plates holding the disk assembly and the actuation assembly, and other parts of the disk drive.

Disk drive shock absorption mechanism

The present invention is a mechanism for making minute adjustments in the position of a read/write head for magnetically or optically reading from or writing to a data storage media. The head positioning mechanism (microactuator) will preferably be used in association with known disk storage actuation systems such as those typically used in current magnetic data storage devices such as hard disk drives, and optical data storage devices such as CDs. The microactuator comprises a slider support arm with a slider formed thereon, that is separated from an anchor structure by a gap. A pizoelectric element is positioned across the gap and is coupled at one end to the slider support arm, and at the other to the anchor structure. The anchor structure has greater resistance to bending than the slider support arm. Thus, when the piezoelectric element changes length, the slider support arm will tend to bend relative to the anchor structure, moving the slider on the slider support arm a controlled minute distance.

Piezoelectric controlled mechanism for minute movement of a magnetic head

A single latch that can secure an actuator arm when a hard disk drive has a clockwise rotational acceleration, or a counterclockwise rotational acceleration. The latch has a first end that can engage a first latch portion of the actuator arm when the disk drive has a clockwise rotational acceleration. The same latch also has a second end that can engage a second latch portion of the actuator arm when the disk drive has a counterclockwise rotational acceleration.

Single lever bi-directional inertia latch

A swage mount plate that can be used to attach a suspension arm to an actuator arm of a hard disk drive. The swage mount plate may include a sleeve that can be inserted into corresponding swage openings of the suspension arm and an actuator beam of the actuator arm. The swage plate may include at least one flange that extends from said sleeve and becomes embedded into the actuator beam. The flange may increase the retention torque of the swage plate.

Swage plate with protruded walls to increase retention torque in hard disk applications

A flexible circuit board which can be assembled into a head gimbal assembly of a hard disk drive. The flexible circuit board may have a conductive tab that is electrically connected to a pre-amp pad and a head pad of the circuit board. The head pad may be connected to a head. The conductive tab may be grounded during handling of the flexible circuit board. Any electrostatic discharge on the head may be grounded through the conductive tab.

Scheme to avoid electrostatic discharge damage to MR/GMR head gimbal/stack assembly in hard disk applications

A spindle motor assembly for a hard disk drive which has a fluid filled tube that dynamically balances the spindle motor. The assembly may include a hub which is rotated by an internal motor. A plurality of disks may be coupled to the hub and separated by a number of spacers. In one embodiment, the fluid filled tube is attached to the hub. In another embodiment, the fluid filled tube is attached to the spacer. The fluid within the tube is allowed to move during rotation of the hub. Movement of the fluid may dynamically balance the spindle motor.

Balance tube for a spindle motor assembly of a hard disk drive

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Sunnyvale, CA, United States of America

Pyongwon Yim