International Business Machines Corporation

Globalfoundries Inc.

Pui Ling Yee

Anthony K Stamper

Kai D Feng

Fen Chen

Kimball M Watson

Jenifer E Lary

Ward A Johnson

Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and usage, and design structures are disclosed herein. The method includes applying a first voltage polarity to an actuator of a Micro-Electro-Mechanical System (MEMS) structure to place the MEMS structure in a predetermined state for a first operating condition. The method further includes applying a second voltage polarity which is opposite from the first voltage polarity to the actuator of the MEMS structure during a subsequent operating condition.

Micro-electro-mechanical system (MEMS) structure and design structures

A metal-to-metal leakage and breakdown testing structure for semiconductor structures and method of using the testing structure is disclosed. The testing structure includes plurality of resistor bridges connected to respective two terminal devices. The testing structure further includes a plurality of switches each having a voltage node provided between resistors of a respective one of the plurality of resistor bridges. The voltage node is read at a circuit pad when a respective one of the plurality of switches is in an on state. The testing structure further includes a device turning on and off each of the plurality of switches, individually.

Testing structure and method of using the testing structure

Growing community of inventors

Essex Junction, VT, United States of America

Pui Ling Yee