Samsung Electronics Co., Ltd.

Applied Materials, Inc.

Priya Gambhire

David J Coumou

Tae Won Song

Krishnan Seethalakshmi Hariharan

Senthil Kumar Vadivelu

Nathan Ransom

Jeremy Zuch

Embodiments disclosed herein include a method for field adjusting calibrating factors of a plurality of RF impedance matches for control of a plurality of plasma chambers. In an embodiment, the method comprises collecting and storing in a memory data from operation of the plurality of RF impedance matches, and finding a tune space for each of the plurality of RF impedance matches from the collected data. In an embodiment, the method further comprises finding adjustments to account for variability in each of the plurality of RF impedance matches, finding adjustments to variable tuning elements of the plurality of RF impedance matches to account for time varying and process related load impedances, and the method further comprises obtaining operating windows for the variable tuning elements in the plurality of RF impedance matches.

Fleetwide impedance tuning performance optimization

A method and apparatus for predicting a state of charge (SoC) of a battery includes estimating an open circuit voltage of the battery based on an open current voltage model, where the open current voltage model is defined by internal parameters that are derived from a battery voltage of the battery, a load current of the battery for a load, or a first SoC of the battery, or any combination thereof; and predicting a second SoC based on the estimated open current voltage.

Method and battery system predicting state of charge of a battery

Growing community of inventors

Bengaluru, India

Priya Gambhire