Lsi Logic Corporation

Preston E Pillow

Steven E Reder

William L Emery

A gas delivery system for delivering a gas to a reactor. The reactor has a reactor chamber, a gas inlet port, and a gas exhaust port. The gas delivery system included a torch chamber having an outer wall extending along a first axis. A torch injector extends into the torch chamber at a first end of the torch chamber. The torch injector includes at least one gas intake port for receiving at least one gas and a gas injector section for expelling the at least one gas into the torch chamber. A gas outlet section is disposed at a second end of the torch chamber. The gas outlet section includes a first tubing member disposed along a second axis and a gas outlet port connected to the first tubing member. The gas outlet port of the gas outlet section engages the gas inlet port of the reactor. The torch chamber, the torch injector, and the gas outlet section of the gas delivery system are formed into a unitized structure with no resealable connections between them.

Reactor system

A system for coupling a ball fitting connected to a first tubing to a socket fitting connected to a second tubing. A first coupling forms an aperture having a diameter that is larger than the diameter of the ball fitting, and receives the ball fitting. The first coupling forms an annular race, with an annular surface disposed between the annular race and the aperture. First split ring pieces are assembled into a first ring that forms an aperture having a diameter that is smaller than the diameter of the ball fitting, and receives the first tubing. The first ring forms an annular ridge that engages the annular race, and aligns the first split ring pieces. The annular surface applies uniform axial pressure to a first surface of the first ring. The first ring has a second surface opposing the first surface that applies uniform axial pressure to a back portion of the ball fitting. A second coupling forms an aperture having a diameter that is larger than the diameter of the socket fitting, and receives the socket fitting. The second coupling forms an annular race, with an annular surface disposed between the annular race and the aperture. Second split ring pieces are assembled into a second ring that forms an aperture having a diameter that is smaller than the diameter of the socket fitting, and receives the second tubing. The second ring forms an annular ridge that engages the annular race, and aligns the second split ring pieces. The annular surface applies uniform axial pressure to a first surface of the second ring. The second ring has a second surface opposing the first surface that applies uniform axial pressure to a back portion of the socket fitting. Engagement means reversibly draw the first coupling and the second coupling toward each other, and releasably hold them together with uniform axial pressure.

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Sandy, OR, United States of America

Preston E Pillow