Applied Materials, Inc.

Other

Pravin K Narwankar

Jonathan Stuart Frankel

Turgut Sahin

Yuriy Melnik

Sukti Chatterjee

Colin Costano Neikirk

David Alexander Britz

Kaushal Gangakhedkar

David P Thompson

Lance A Scudder

Quoc Truong

Thomas Knisley

Laxman Murugesh

Shreyas Kher

Randall Scott Urdahl

Mark Joseph Saly

Patricia M Liu

Ravi Rajagopalan

Sekar Krishnasamy

Victor Pushparaj

Govindraj Desai

Joseph Yudovsky

Visweswaren Sivaramakrishnan

Dieter Haas

David Masayuki Ishikawa

Craig Metzner

Kent Rossman

Kenric T Choi

Kenichi Ohno

Joe Griffith Cruz

Maciek Orczyk

Li-Qun Xia

Nag B Patibandla

Jeonghoon Oh

Son Truong Nguyen

Banqiu Wu

Nyi O Myo

Ralf Hofmann

Omkaram Nalamasu

Paul L Deaton

Walter Zygmunt

Fei Wang

Miaojun Wang

Shankar Muthukrishnan

Toshiaki Fujita

Steve Poppe

Sameer Desai

Gregory F Redinbo

Wong-Cheng Shih

Paul Deaten

K V Ravi

Asher Sinensky

Annabel Susan Nickles

Srinivas Satya

Shrikant Swaminathan

Nitin K Ingle

Abhijit Basu Mallick

Michael Robert Rice

Randhir P Thakur

Randhir P S Thakur

David K Carlson

Philip Allan Kraus

Khaled Ahmed

Christopher Sean Olsen

Jeffrey W Anthis

Yi Ma

Kartik Bhupendra Shah

Arvind Sundarrajan

Jun Zhao

Sanjay Krupakar Bhat

Gregg Higashi

Shivkumar Chiruvolu

Alan Hiroshi Ouye

Padmanabhan Krishnaraj

Annamalai Lakshmanan

Murali K Narasimhan

Yaxin Wang

Kedarnath Sangam

Jianmin Qiao

Gary Eugene Miner

Ranga Rao Arnepalli

Deepak Upadhyaya

Kiran V Thadani

Jingjing Xu

Xiaoliang Jin

Eric H Liu

Huyen Karen Tran

Miriam Schwartz

Shankarram Athreya

Kashif Maqsood

Bipin Thakur

Mahesh Arcot

Arnaud Lepert

Mouloud Bakli

Khai Ngo

Suresh Chand Seth

Huyen T Tran

Balaji Ganapathy

Subbalakshmi Sreekala

Vikas Gujar

A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated, wherein the rotary vacuum chamber is coupled to the motors, a controller configured to cause the motors to rotate the rotary vacuum chamber about an axial axis of the rotary vacuum chamber such that the particles undergo tumbling agitation, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the rotary vacuum chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.

Rotary reactor for uniform particle coating with thin films

A pharmaceutical composition containing a metal oxide coated particle comprising 1) an amorphous solid dispersion (ASD) core containing an active pharmaceutical ingredient (API) and a polymer; and 2) a metal oxide coating, and the method of making said metal oxide coated particle by atomic layer deposition (ALD). The metal oxide coated particle is useful because it prevents the ASD from crystallization and helps maintain the ASD in an amorphous form.

Coated drug compositions and methods of preparing the same

A reactor for coating particles includes a vacuum chamber configured to hold particles to be coated, a vacuum port to exhaust gas from the vacuum chamber via the outlet of the vacuum chamber, a chemical delivery system configured to flow a process gas into the particles via a gas inlet on the vacuum chamber, one or more vibrational actuators located on a first mounting surface of the vacuum chamber, and a controller configured to cause the one or more vibrational actuators to generate a vibrational motion in the vacuum chamber sufficient to induce a vibrational motion in the particles held within the vacuum chamber.

Particle coating methods and apparatus

A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.

Reactor for coating particles in stationary chamber with rotating paddles

A reactor for coating particles includes a stationary vacuum chamber that has a lower portion that forms a half-cylinder and an upper portion and that holds a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, and a gas injection assembly that includes a vaporizer to convert a first liquid to a first reactant or precursor gas, a manifold to receive the first reactant or precursor gas from the vaporizer, and a plurality of channels leading from the manifold to a plurality of apertures located in the lower portion of the chamber.

Reactor for coating particles in stationary chamber with rotating paddles and gas injection

A method of preparing a pharmaceutical composition having a drug-containing core enclosed by one or more silicon oxide materials is provided. The method entails alternating exposing the particles to gaseous or vaporous SiCland gaseous or vaporous HO at a reduced temperature and in the absence of a catalyst.

Low temperature process for preparing silicon oxide coated pharmaceuticals

Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof and can have a thickness from 1 nm to 3,000 nm.

Protection of components from corrosion

Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof.

Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a coating on an aerospace component includes depositing one or more layers on a surface of the aerospace component using an atomic layer deposition or chemical vapor deposition process, and performing a partial oxidation and annealing process to convert the one or more layers to a coalesced layer having a preferred phase crystalline assembly. During oxidation cycles, an aluminum depleted region is formed at the surface of the aerospace component, and an aluminum oxide region is formed between the aluminum depleted region and the coalesced layer. The coalesced layer forms a protective coating, which decreases the rate of aluminum depletion from the aerospace component and the rate of new aluminum oxide scale formation.

Methods of protecting aerospace components against corrosion and oxidation

Embodiments of the present disclosure generally relate to protective coatings on aerospace components and methods for depositing the protective coatings. In one or more embodiments, a method for producing a protective coating on an aerospace component includes depositing a metal oxide template layer on the aerospace component containing nickel and aluminum (e.g., nickel-aluminum superalloy) and heating the aerospace component containing the metal oxide template layer during a thermal process and/or an oxidation process. The thermal process and/or oxidation process includes diffusing aluminum contained within the aerospace component towards a surface of the aerospace component containing the metal oxide template layer, oxidizing the diffused aluminum to produce an aluminum oxide layer disposed between the aerospace component and the metal oxide template layer, and removing at least a portion of the metal oxide template layer while leaving the aluminum oxide layer.

Methods for depositing sacrificial coatings on aerospace components

A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle assembly, a chemical delivery system to deliver a first fluid, and a first gas injection assembly to receive the first fluid from the chemical delivery system and having apertures configured to inject a first reactant or precursor gas into the lower portion of the chamber and such that the first reactant or precursor gas flows substantially tangent to a curved inner surface of the half-cylinder.

Methods of removing native oxide layers and depositing dielectric layers having a controlled number of active sites on MEMS devices for biological applications are disclosed. In one aspect, a method includes removing a native oxide layer from a surface of the substrate by exposing the substrate to one or more ligands in vapor phase to volatize the native oxide layer and then thermally desorbing or otherwise etching the volatized native oxide layer. In another aspect, a method includes depositing a dielectric layer selected to provide a controlled number of active sites on the surface of the substrate. In yet another aspect, a method includes both removing a native oxide layer from a surface of the substrate by exposing the substrate to one or more ligands and depositing a dielectric layer selected to provide a controlled number of active sites on the surface of the substrate.

Method, materials and process for native oxide removal and regrowth of dielectric oxides for better biosensor performance

Methods for forming protective coatings on aerospace components are provided. In one or more embodiments, the method includes exposing an aerospace component to a first precursor and a first reactant to form a first deposited layer on a surface of the aerospace component by a first deposition process (e.g., CVD or ALD), and exposing the aerospace component to a second precursor and a second reactant to form a second deposited layer on the first deposited layer by a second deposition process. The first deposited layer and the second deposited layer have different compositions from each other. The method also includes repeating the first deposition process and the second deposition process to form a nanolaminate film stack having from 2 pairs to about 1,000 pairs of the first deposited layer and the second deposited layer consecutively deposited on each other.

Methods for depositing coatings on aerospace components

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Sunnyvale, CA, United States of America

Pravin K Narwankar