Infineon Technologies Ag

Prashanth Makaram

Abidin Güçlü Onaran

Stephan Pindl

Cecilia Carbonelli

Joerg Ortner

Alexander Zoepfl

John Cooper

Caterina Travan

Alfons Dehe

Ulrich Krumbein

Christian Bretthauer

Arnaud Walther

Abidin Guclu Onaran

An apparatus includes a semiconductor-based substrate with a functional structure that is formed in or on the semiconductor-based substrate. The apparatus includes a frame structure surrounding the functional structure and includes a coating that covers the functional structure and is delimited by the frame structure.

Apparatus having a functional structure delimited by a frame structure and method for producing same

A method includes exposing gas sensitive material of a gas sensor device to different adjusted target gas concentrations, determining measurement values of the resistance of the gas sensitive material between first and second contact regions in response to the adjusted target gas concentration, determining a first gas sensor behavior model based on the measurement values of the resistance of the gas sensitive material as a function of the adjusted target gas concentration, translating the first gas sensor behavior model into a corresponding second gas sensor behavior model for the resistance of the gas sensitive material as a function of a control voltage, and sweeping the control voltage based on the second gas sensor behavior model over a control voltage range for providing control voltage dependent resistance data, wherein the control voltage dependent resistance data over the control voltage range form the calibration data for the gas sensor device.

Method for providing calibration data for a gas sensor device, method of calibrating a gas sensor device, and processing device for a gas sensor device

The present disclosure relates to a sensor device including a gas sensor disposed on a first substrate, a heating element disposed within the first substrate so that the gas sensor overlaps the heating element, a processor operatively coupled to the gas sensor and the heating element, and a memory storing a program to be executed by the processor. The gas sensor is configured to measure first sensor data points and second sensor data points. The program includes instructions for performing the following steps in real-time: recording first resistance values and second resistance values of the heating element; adjusting the second sensor data points using the first sensor data points, the first resistance values, and the second resistance values to obtain corrected sensor data points; and determining sensed values from the corrected sensor data points.

Gas sensing systems and methods of operation thereof

A gas sensing device includes gas sensors for generating signal samples corresponding to a concentration of a gas; a heat source for heating the gas sensors according to a first temperature profile during recovery phases and according to a second temperature profile during sense phases, a preprocessing processor for preprocessing the received signal samples; a feature extraction processor for extracting feature values from the preprocessed signal samples; a humidity processor for estimating a humidity value of the mixture of gases, including a first trained model based algorithm processor, and wherein the humidity value is based on an output of the first algorithm processor; a gas concentration processor for creating sensing results, wherein the gas concentration processor comprises a second trained model based algorithm processor, wherein the sensing results are based on output values of the second algorithm processor, and wherein the sensing results depend on the humidity value.

Gas sensing device and method for operating a gas sensing device

A sensor device includes a gas sensor disposed on a first substrate, a heating element disposed within the first substrate, a processor operatively coupled to the gas sensor and the heating element, and a memory storing a program to be executed by the processor. The gas sensor is configured to measure first sensor data points and second sensor data points. The gas sensor overlaps the heating element. The program includes instructions for performing the following steps in real-time: recording first resistance values and second resistance values of the heating element; adjusting the second sensor data points using the first sensor data points, the first resistance values, and the second resistance values to obtain corrected sensor data points; and determining sensed values from the corrected sensor data points.

A method of gas sensing includes obtaining a first signal by a gas sensor, generating one or more second signals according to the first signal, and calculating a first weight value corresponding to the first signal. The first signal indicates a response of the gas sensor to a concentration of a target gas at the gas sensor. The method of gas sensing further includes calculating one or more second weight values corresponding to each of the one or more second signals and calculating an estimated concentration of the target gas at the gas sensor according to the first weight value and the one or more second weight values.

Sensing systems and methods for the estimation of analyte concentration

A method of sensing includes obtaining first sensor data points by a sensor, obtaining first reference data points, and determining a correlation between the first sensor data points and the first reference data points. The method of sensing further includes measuring second sensor data points by the sensor, obtaining second reference data points, and adjusting the second sensor data points using the correlation and the second reference data points to obtain corrected sensor data points. The method of sensing also includes determining sensed values from the corrected sensor data points and storing the sensed values.

In accordance with an embodiment, a MEMS sensor includes a membrane that is suspended from the substrate, a resonant frequency of said membrane being influenced by an ambient pressure that acts on the membrane; and an evaluation device configured to perform a first measurement based on the resonant frequency of the membrane to obtain a measurement result, where the evaluation device is configured to at least partly compensate an influence of the ambient pressure on the measurement result.

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Munich, Germany

Prashanth Makaram