Lam Research Corporation

Prashanth Kumar

Andrew D Bailey, Iii

Ye Feng

Methods and systems for using a time-series of spectra to identify endpoint of an etch process. One method includes accessing a virtual carpet that is generated from a time-series of spectra for an etch process. A polynomial with coefficients represents the virtual carpet. The method includes processing a fabrication etch process on a fabrication wafer and generating a carpet defined from a time-series of spectra while processing the fabrication etch process. While the processing the fabrication etch process and generating the carpet, comparing portions of the carpet and the virtual carpet to identify an endpoint metric of the fabrication etch process.

Method of feature exaction from time-series of spectra to control endpoint of process

Methods and systems for using a time-series of spectra to identify endpoint of an etch process. One method includes accessing a virtual carpet that is formed from a time-series of spectra for the etch process collected during a training operation. And, running a fabrication etch process on a fabrication wafer, such that while the fabrication etch process is performed portions of a carpet defined from a time-series of spectral is generated for the fabrication etch process. Then, comparing the portions of the carpet of the fabrication etch process to the virtual carpet. End pointing is processed for the fabrication etch process when said comparing indicates that a desired metric has been reached for the fabrication wafer. In one example, said portions of the carpet include a current frame of captured spectra and at least one previous frame of captured spectra. The portions of the carpet of the fabrication etch process are fitted to the virtual carpet to identify a virtual frame number and associated floating parameters that are used in a correlation to predicted a value for the metric. Further, each of the carpets produced during the training operation and the virtual carpet are defined by a polynomial. The coefficients of the carpets produced during the training operation are a subset of the coefficients of the polynomial of the virtual carpet.

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Prashanth Kumar