Semiconductor Components Industries, LLC

Motorola Corporation

Prasad Venkatraman

Balaji Padmanabhan

Zia Hossain

Gordon M Grivna

Ali Salih

Chun-Li Liu

Peter Austin Burke

Francine Y Robb

Gary Horst Loechelt

Jason McDonald

Dean E Probst

Kirk K Huang

Alexander Young

Peter Moens

Woochul Jeon

Stephen P Robb

Jeffrey Pearse

James Sellers

John Michael Parsey, Jr

Mihir Mudholkar

George Chang

Peter McGrath

Hemanshu D Bhatt

Herbert De Vleeschouwer

Muh-Ling Ger

Agajan Suwhanov

Tirthajyoti Sarkar

Carroll Casteel

Irene S Wan

Emily M Linehan

Bich-Yen Nguyen

Leo Mathew

Stephen St Germain

Phillip Celaya

Jaume Roig-Guitart

Duane B Barber

Joe Fulton

Masaichi Eda

Keith G Kamekona

Jeffery Allen Neuls

Brian Pratt

Donald Zaremba

Huy Trong Tran

Philip Celaya

Jr John Parsey

A method includes forming an ion-implanted capping layer in a first epitaxial layer disposed on a silicon substrate. The ion-implanted capping layer is doped with a second dopant of a same conductivity type as a first dopant in the silicon substrate. The second dopant has a lower diffusivity than the diffusivity of the first dopant. The ion-implanted capping layer has a thickness configured to contain up-diffusion of the first dopant from the silicon wafer in the first epitaxial layer in thermal processes for fabricating a vertical MOSFET device in the substrate. The ion-implanted capping layer is configured to limit up-diffusion of the first dopant from the silicon wafer through the ion-implanted capping layer into a second epitaxial layer such that a concentration of the first dopant in the second epitaxial layer is lower than a concentration of the first dopant in the first epitaxial layer.

Up-diffusion suppression in a power MOSFET

A MOSFET device die includes an active area formed on a semiconductor substrate. The active area includes a first active area portion and a second active area portion. At least one mesa is formed in the semiconductor substrate extending in a longitudinal direction through the active area. The at least one mesa includes a channel region extending in a longitudinal direction. The channel region includes low threshold voltage channel portions and high threshold voltage channel portions. The first active area portion includes the channel portions in a first ratio of low threshold voltage channel portions to high threshold voltage channel portions, and the second active area portion includes channel portions in a second ratio of low threshold voltage channel portions to high threshold voltage channel portions. The first ratio is larger than the second ratio.

Power MOSFET with improved safe operating area

In one embodiment, a semiconductor device is formed having a plurality of active trenches formed within an active region of the semiconductor device. A first insulator is formed along at least a portion of sidewalls of each active trench. A perimeter termination trench is formed that surrounds the active region. The perimeter termination trench is formed having a first sidewall that is adjacent the active region and a second sidewall that is opposite the first sidewall. An insulator is formed along the second sidewall that has a thickness is greater than an insulator that is formed along the first sidewall.

Semiconductor device and structure therefor

A circuit and physical structure can help to counteract non-linear Cassociated with power transistors that operate at higher switching speeds and lower R. In an embodiment, a component with a pn junction can be coupled to an n-channel IGFET. The component can include a p-channel IGFET, a pnp bipolar transistor, or both. A gate/capacitor electrode can be within a trench that is adjacent to the active regions of the component and n-channel IGFET, where the active regions can be within a semiconductor pillar. The combination of a conductive member and the semiconductor pillar of the component can be a charge storage component. The physical structure may include a compensation region, a barrier doped region, or both. In a particular embodiment, doped surface regions can be coupled to a buried conductive region without the use of a topside interconnect or a deep collector type of structure.

Electronic device including a charge storage component

In a general aspect, a transistor can include a trench disposed in a semiconductor region and a gate electrode disposed in an upper portion of the trench. The gate electrode can include a first and second gate electrode segments. The transistor can also include a shield electrode having a first shield electrode portion disposed in a lower portion of the trench, and a second shield electrode portion orthogonally extending from the first shield electrode portion in the lower portion of the trench to the upper portion of the trench. The first shield electrode portion can be disposed below the first and second gate electrode segments, and the second shield electrode portion can being disposed between the first and second gate electrode segments. The transistor can also include a patterned buried conductor layer. The first and second gate electrode segments can be electrically coupled via the patterned buried conductor layer.

Trench gate transistors with low-resistance shield and gate interconnects

A substrate for fabricating a MOSFET device includes a first epitaxial layer disposed on a silicon wafer. The silicon wafer is doped with a first dopant. A second epitaxial layer is disposed on the first epitaxial layer. An ion-implanted capping layer is disposed in the first epitaxial layer. The ion-implanted capping layer is doped with a second dopant. The first dopant has a diffusion coefficient in silicon higher than a diffusion coefficient of the second dopant in silicon. The ion-implanted capping layer is configured to limit up-diffusion of the first dopant from the silicon wafer into the second epitaxial layer.

An electronic device can include doped regions and a trench disposed between the doped regions, wherein the trench can include a conductive member. In an embodiment, a parasitic transistor can include doped regions as drain/source regions and the conductive member as a gate electrode. A semiconductor material can lie along a bottom or sidewall of the trench and be a channel region of the parasitic transistor. The voltage on the gate electrode or the dopant concentration can be selected so that the channel region does not reach inversion during the normal operation of the electronic device.

Electronic device including doped regions and a trench between the doped regions

Systems and methods of the disclosed embodiments include an electronic device that has a gate electrode for supplying a gate voltage, a source, a drain, and a channel doped to enable a current to flow from the drain to the source when a voltage is applied to the gate electrode. The electronic device may also include a gate insulator between the channel and the gate electrode. The gate insulator may include a first gate insulator section including a first thickness, and a second gate insulator section including a second thickness that is less than the first thickness. The gate insulator sections thereby improve the safe operating area by enabling the current to flow through the second gate insulator section at a lower voltage than the first gate insulator section.

Electronic device having multi-thickness gate insulator

A device has an active area made of an array of first type of device cells and a gate or shield contact area made of an array of a second type of device cells that are laid out at a wider pitch than the array of first type of device cells. Each first type of device cell in the active area includes a trench that contains a gate electrode and an adjoining mesa that contains the drain, source, body, and channel regions of the device. Each second type of device cell in the gate or shield contact area includes a trench that is wider and deeper than the trench in the first type device cell.

Trench MOSFET contacts

Method of forming a semiconductor device and structure therefor

An electronic device can include a transistor having a gate electrode, a first portion, and a second portion, wherein along the gate electrode, the first portion of the transistor has a first gate-to-drain capacitance and a first gate-to-source capacitance, the second portion of the transistor has a second gate-to-drain capacitance and a second gate-to-source capacitance, and a ratio of the first gate-to-drain capacitance to the first gate-to-source capacitance is less than a ratio of the second gate-to-drain capacitance to the second gate-to-source capacitance.

Electronic device including a transistor having structures with different characteristics

In one embodiment, a method of forming a semiconductor device forms gate trenches in a semiconductor substrate. A portion of the material between the trenches is narrowed and another material is formed on sidewalls of the narrowed portion that is substantially not etched by an etchant that etches the material of the portion of the material between the trenches. Source and gate contact openings are formed together.

Method of forming a semiconductor device

In accordance with an embodiment, a semiconductor component includes a support and a plurality of leads. An insulated metal substrate having a first portion and a second portion bonded to the support. A semiconductor chip comprising a III-N semiconductor material is bonded to the first portion of the insulated metal substrate and a first electrical interconnect is coupled between a drain bond pad the first portion of the insulated metal substrate. A second semiconductor chip is bonded to the first electrical interconnect. A second electrical interconnect coupled between a lead of the plurality of leads and the second semiconductor chip. In accordance with another embodiment, a method of manufacturing a semiconductor component includes coupling a first semiconductor chip to a first electrically conductive layer and coupling a second semiconductor chip to a second electrically conductive layer.

Semiconductor component and method of manufacture

An electronic device can include a channel layer and a barrier layer overlying the channel layer. In an embodiment, the electronic device can include a component disposed along a current path between a gate terminal and a gate electrode of a first transistor. In another embodiment, the electronic device can include a second transistor wherein source and gate electrodes of the second transistor are coupled to the gate electrode of the first transistor, and a drain electrode of the second transistor is coupled to the gate terminal. A circuit can include a transistor and a diode. The transistor can include a drain, a gate, and a source, wherein the drain is coupled to a drain terminal, and the source is coupled to a source terminal. The diode can have an anode is coupled to the gate terminal, and a cathode is coupled to a gate of the transistor.

Circuit and electronic device including an enhancement-mode transistor

A method for forming a cascode rectifier structure includes providing a group III-V semiconductor structure includes a heterostructure disposed on a semiconductor substrate. A first current carrying electrode and a second current carrying electrode are provided adjacent a major surface of the heterostructure and a control electrode is provided between the first and second current carrying electrode. A rectifier device is provided integrated with the group III-V semiconductor structure and is electrically connected to the first current carrying electrode and to a third electrode. The control electrode is provided further electrically connected to the semiconductor substrate and the second current path is generally perpendicular to a primary current path between the first and second current carrying electrodes. The cascode rectifier structure is provided as a two terminal device.

Cascode semiconductor device structure and method therefor

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Gilbert, AZ, United States of America

Prasad Venkatraman