Facebook Technologies, LLC

Meta Platforms Technologies, LLC

Oculus, Vr, LLC

Pooya Saketi

Oscar Torrents Abad

Daniel Brodoceanu

Patrick Joseph Hughes

Ali Sengül

Allan Pourchet

Karsten Moh

William Padraic Henry

Joseph O'Keeffe

Zheng Sung Chio

Jeb Wu

Tilman Zehender

David Massoubre

Celine Claire Oyer

Remi Alain Delille

Andrew John Ouderkirk

Nicholas Roy Corson

Padraig Hughes

Thomas John Farrell Wallin

Tennyson Nguty

Robert Manson

Leif-Erik Sharif Simonsen

Chao Kai Tung

Katherine Healy

Robin Sharma

James Ronald Bonar

Christopher Percival

Yigit Menguc

Vincent Brennan

Daniel Bryce Thompson

Yigit Mengue

Alexander Udo May

William Anthony Wall

Thiago Martins Amaral

Embodiments relate to forming an elastomeric interface layer (elayer) with a flap over multiple light emitting diode (LED) dies by forming materials across multiple LED dies and removing the materials between the LED dies. The formed flap of the elayer provides a large surface area for adhesion between each LED and a pick-up surface. For example, the flap may have a surface area that is larger than the light emitting surface of the LED die, or larger than the surface area of an elastomeric interface layer without the flap. As such, the elayer allows each LED to be picked up by a pick-up surface and placed onto a display substrate including control circuits for sub-pixels of an electronic display. In some embodiments, the LED dies are micro-LED (μLED) dies.

Forming conformable layer with flap on semiconductor devices

A pick-up head picks up a semiconductor device from a carrier substrate. The pick-up head includes a first leg portion, a second leg portion, a raised bridge base portion between the first and second leg portions, and a tip portion mounted on the raised bridge base portion. The tip portion engages with the semiconductor device to pick up the semiconductor device from the carrier substrate. The pick-up head is associated with a force detection mechanism that detects a force applied to the pick-up head for picking up the semiconductor device. The force detection mechanism includes cavities formed on the first leg portion and/or second leg portion, pillars arranged on the pick-up head, a force detection device arranged in a mount assembly that is attached on the pick-up head, or electrodes arranged on the mount assembly. Actuation of the pick-up head is determined based on the detected force.

Detection of force applied by pick-up tool for transferring semiconductor devices

A pick-up tool (PUT) includes a bridge pick-up head. The bridge pick-up head includes: a first bridge leg portion, a second bridge leg portion, and a bridge center portion between the first and second leg portions, the first and second bridge leg portions each including a top surface and side surfaces, the top surfaces of the first and second bridge leg portions extending above the bridge center portion; a bridge base portion on the bridge center portion, the bridge base portion including a bottom side on the bridge center portion, a top side that is smaller than the bottom side, and one or more sloped surfaces defined between the top and bottom sides; and a tip configured to attach with a semiconductor device on the top side of the bridge base portion.

Bridge pick-up head for transferring semiconductor devices

Embodiments relate to the design of an electronic device capable having flexible interconnects that connect together a first body and a second body of the electronic device. The flexible interconnects allow the electrical device to better withstand thermal-mechanical stress during fabrication of the electronic device and user usage of the electronic device.

Flexible interconnect using conductive adhesive

A pick-up head assembly comprises a body of a liquid crystalline elastomer (LCE) that undergoes a reversible expansion when exposed to a first frequency of light and contracts when exposed to a second frequency of light. Selective portions of the LCE in the pick-up head assembly are irradiated with the first frequency to cause an expansion in the selective portions. The adhesive forces of the expanded portions of the LCE are used to pick-up semiconductor devices from a first substrate. The semiconductor devices are placed on a second substrate by exposing the expanded portions of the LCE to the second frequency of light, causing the expanded portions to contract.

Liquid crystalline elastomer for pick and place of semiconductor devices

A light emitting diode (LED) chip is bonded to a substrate. The LED chip includes one or more dummy electrodes that corresponds to one or more contacts on the substrate. The one or more dummy electrodes are exposed to a laser beam for coupling the one or more dummy electrodes to the one or more contacts. The one or more dummy electrodes may be positioned along edges of the LED chip that surround a display area of the LED chip and provide bonding strength between the LED chip and the substrate.

Bonding dummy electrodes of light emitting diode chip to substrate

A light emitting diode (LED) chip is bonded to a substrate. The LED chip includes a plurality of electrodes that each corresponds to a contact on the substrate. The plurality of electrodes are exposed to one or more laser beams for coupling the LED chip to the substrate. The laser beams may be directed to one or more edges or corners of the plurality of electrodes, where the edges or corners lie outside emission areas of LEDs on the LED chip.

Bonding corners of light emitting diode chip to substrate using laser

A light-emitting diode (LED) array is formed by bonding an LED chip or wafer to a backplane substrate via curved interconnects. The backplane substrate may include circuits for driving the LED's. One or more curved interconnects are formed on the backplane substrate. A curved interconnect may be electrically connected to a corresponding circuit of the backplane substrate, and may include at least a portion with curvature. The LED chip or wafer may include one or more LED devices. Each LED device may have one or more electrical contacts. The LED chip or wafer is positioned above the backplane substrate to spatially align electrical contacts of the LED devices with the curved interconnects on the backplane substrate. The electrical contacts are bonded to the curved interconnects to electrically connect the LED devices to corresponding circuits of the backplane substrate.

Curved pillar interconnects

Embodiments herein address these and other issues by providing a display assembly system with a pick-up tool having 6 degrees of freedom (6DOF) coupled with a pick-up head having an at least partially transparent adhesive element to which light-emitting structures may be adhered for picking and placement during the display manufacture process. Embodiments further include a touchdown sensor coupled with the pick-up tool and pick-up head that allow sensing of a force applied to the pick-up head in an upward direction.

Display fabrication microassembly system

To manufacture a device by picking and placing semiconductor devices from a carrier substrate to a target substrate using touch down sensors, a pick-up head including touch down sensors and the semiconductor devices on the carrier substrate are moved relative to each other to contact the carrier substrate with the touch down sensors. Signals from each touch down sensor indicating a degree of deformation of each touch down sensor caused by the contact with the carrier substrate are used to determine an orientation of the pick-up head by processing the signals, and adjust the orientation of the pick-up head based on the determined orientation to attach the semiconductor devices onto the pick-up head. In some embodiments, the touch down sensors are piezoelectric benders.

Pickup head with touch down sensor

Techniques are disclosed for utilizing an etchant-accessible carrier substrate that enables etching through the carrier substrate. More particularly, an etchant is provided access to the adhesive layer via the etchant-accessible carrier substrate via one or more holes in the etchant-accessible carrier substrate. The size and/or pattern of the holes may vary, depending on desired functionality. The etching process may be optionally stopped prior to the removal of all of the adhesive layer such that at least a portion of the adhesive layer remains, which can help ensure the light-emitting structures do not slip off of the etchant-accessible carrier substrate as the etchant-accessible carrier substrate is moved from one location to another during the fabrication process.

Etchant-accessible carrier substrate for display manufacture

Embodiments relate to forming an elastomeric interface layer (elayer) with a flap over multiple light emitting diode (LED) dies by forming materials across multiple LED dies and removing the materials between the LED dies. The formed flap of the elayer provides a large surface area for adhesion between each LED and a pick-up surface. For example, the flap may have a surface area that is larger than the light emitting surface of the LED die, or larger than the surface area of an elastomeric interface layer without the flap. As such, the elayer allows each LED to be picked up by a pick-up surface and placed onto a display substrate including control circuits for sub-pixels of an electronic display. In some embodiments, the LED dies are micro-LED (&#x3bc;LED) dies.

A method and system for assembling a device by picking up semiconductor devices from a carrier substrate and placing the semiconductor devices onto a target substrate. The transfer of the semiconductor devices uses fluid as a transfer medium. The fluid enters a fluid channel of a pickup head, causing the pickup head to expand, make contact with, and attach to an aligned semiconductor device. After the semiconductor device is aligned with and placed onto the target substrate, at least a portion of the fluid is removed from the pickup head to release the semiconductor device onto the target substrate. The semiconductor device bonds to the target substrate.

Fluidic pick-up head for assembling light emitting diodes

Embodiments relate to using photocurable polymers to place light emitting diodes (LEDs) onto an electronic display substrate after fabrication of the LEDs. A LED assembly system places LEDs on a temporary substrate after fabrication and applies a a photocurable polymer onto the top surfaces of the LEDs. A transparent pickup head aligns with a subset of the LEDs. The pickup head is positioned on the top surfaces of the subset of LEDs such that the layer of the photocurable polymer is in between the pickup head and the top surface of the subset of the LEDs. Light is directed through the pickup head to cure the photocurable polymer, adhering the subset of LEDs to the pickup head. The subset of LEDs is removed away from the temporary substrate, due to relative movement between the temporary substrate and the pickup head.

Pickup head with photocurable polymers for assembling light emitting diodes

A method and system for manufacturing a device by forming a conformable interface layer from elastomer solution on semiconductor devices to facilitate picking and placing the semiconductor devices from a carrier substrate to a target substrate. The method may include transferring elastomer solution onto fluidic tips of a subset of fluidic heads of a fluidic head array by extending one or more fluidic head actuators of the subset of the fluidic heads, transferring the elastomer solution on the fluidic tips of the subset of the fluidic heads to semiconductor devices on a carrier substrate to form conformable interface layers on the semiconductor devices, and picking up the semiconductor devices via adhesive attachment with the conformable interface layers from the carrier substrate to place on a target substrate.

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Cork, Ireland

Pooya Saketi