National Yang Ming Chiao Tung University

Po-Yi Kuo

Po-Tsun Liu

Tien-Sheng Chao

Tsung-Che Chiang

Zhen-Hao Li

Yi-Hsien Lu

A thin-film transistor includes a substrate, a first thin-film structure, a gate structure, and a second thin-film structure that are sequentially disposed on one another. The first thin-film structure includes a channel layer, and first source and drain layers disposed at opposite sides of the channel layer. The gate structure includes a common gate electrode disposed on the channel layer, and a gate insulating layer wrapping the common gate electrode and covering the first thin-film structure. The second thin-film structure includes an active layer disposed on the gate insulating layer and including an indium oxide-based material, and second source and drain layers disposed at opposite sides of the active layer.

Thin-film transistor device

The present invention discloses a manufacturing method of a semiconductor component with a nanowire channel. The method comprises the following steps. The step of forming a stack structure on a substrate is performed. A semiconductor layer is formed on the substrate and the stack structure and further filled into the fillister. The semiconductor layer is patterned to form a source area and a drain area, and the channel region is located between the source area and the drain area. The semiconductor layer located outside the source area, the drain area and the fillister will be removed. And then, the stack structure is then removed. Therefore, the semiconductor layer filled inside the fillister will be exposed to be as a channel. A gate oxide layer is formed to cover the channel, and a gate layer is then formed on the gate oxide layer.

Growing community of inventors

Pingtung County, Taiwan

Po-Yi Kuo