Taiwan Semiconductor Manufacturing Comp. Ltd.

Po-Sung Kuo

Yung-Dar Chen

Yen-Chun Wang

Ming-Tsong Wang

Tung-Li Wu

Ming-Chien Wen

Dar-Rung Kuo

Jheng-Long Chou

Ming-Wen Huang

An exhaust system and a mini-exhaust static pressure controlling apparatus thereof for controlling a process area. The mini-exhaust static pressure controlling apparatus has an exhaust chamber and an auto release damping device. The exhaust chamber has an air inlet connected to the process area receiving air exhaust from the process area, and an air outlet venting the air exhaust. The auto release damping device has a diaphragm pre-stressed in an arc shape with a coefficient of elasticity and an adjusting device for applying a stress on the diaphragm to maintain the arc shape of the diaphragm, and is disposed on the exhaust chamber to control static pressure of the air exhaust in the exhaust chamber.

Exhaust system and mini-exhaust static pressure controlling apparatus thereof

An air supply system for a clean room with a critical machine. An intake duct connects the exterior of the clean room to a make-up air unit, and is configured to transport external air into the make-up air unit. A first air duct connects the make-up air unit to an air conditioning cabinet including a first chemical filter, and is configured to transport the air flowing through the make-up air unit into the air conditioning cabinet. The first chemical filter removes airborne molecular contamination from the air transported into the air conditioning cabinet. A second air duct connects the air conditioning cabinet to the critical machine, and is configured to transport the air flowing through the first chemical filter of the air conditioning cabinet into the critical machine. An exhaust duct connects the critical machine to the exterior of the clean room, discharging waste gas produced in the critical machine.

Air supply systems and pressure adjustment devices for use therewith

An air purification system for treating pollutants in a gas stream. The air purification system includes a housing with a plurality of nozzles, an acidic water supply device and an alkaline water supply device. The housing introduces the gas stream. The acidic water supply device supplies acidic water for first nozzles to spray acidic mist. The alkaline water supply device supplies alkaline water for second nozzles to spray alkaline mist. The acidic mist and alkaline mist neutralize acidic gas and alkaline gas contained in the gas stream.

Dual-type air purification system

An air purification system which is well-suited to removing particles from outside air as the air flows into a cleanroom used in the fabrication of semiconductor integrated circuits. A housing provides at least one spray nozzle for spraying fine mist water droplets. In use, the water droplets capture the airborne particles in the air flowing through the housing and adhere to the water droplet target. The water droplets coalesce and form larger droplets which adhere to the surface of the water droplet target and ultimately collect in a drain pan. The low-density water droplet target prevents large pressure differentials from forming in the housing, which pressure differentials may otherwise cause re-vaporization of the water droplets from the target and re-flow of the particles in the flowing air.

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Tainan, Taiwan

Po-Sung Kuo